Kim Yangjin, Moon Younghoon, Hibino Kenichi, Sugita Naohiko, Mitsuishi Mamoru
Appl Opt. 2020 Feb 1;59(4):991-997. doi: 10.1364/AO.379718.
Two types of phase-shifting algorithms were developed for simultaneous measurement of the surface and thickness variation of an optical flat. During wavelength tuning, phase-shift nonlinearity can cause a spatially nonuniform error and spatially uniform DC drift error. A 19-sample algorithm was developed that eliminates the effect of the spatially uniform error by expanding the 17-sample algorithm with characteristic polynomial theory. The 19-sample algorithm was then altered to measure the surface shape of the optical flat by rotation of the characteristic diagram. The surface shape and thickness variation were measured with these two algorithms and a wavelength-tuning Fizeau interferometer.
为同时测量光学平板的表面和厚度变化，开发了两种相移算法。在波长调谐过程中，相移非线性会导致空间不均匀误差和空间均匀直流漂移误差。通过利用特征多项式理论扩展17样本算法，开发了一种19样本算法，该算法消除了空间均匀误差的影响。然后通过旋转特征图改变19样本算法来测量光学平板的表面形状。使用这两种算法和波长调谐菲索干涉仪测量了表面形状和厚度变化。
