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通过功能化和烧结银附着实现的碳纳米管互连。

Carbon Nanotube Interconnects Realized through Functionalization and Sintered Silver Attachment.

机构信息

National Physical Laboratory , Hampton Road, Teddington TW11 0LW, United Kingdom.

Advanced Technology Institute, University of Surrey , Guildford GU2 7XH, United Kingdom.

出版信息

ACS Appl Mater Interfaces. 2016 Mar 2;8(8):5563-70. doi: 10.1021/acsami.5b12057. Epub 2016 Feb 16.

Abstract

Carbon nanotubes (CNTs) in the form of interconnects have many potential applications, and their ability to perform at high temperatures gives them a unique capability. We show the development of a novel transfer process using CNTs and sintered silver that offers a unique high-temperature, high-conductivity, and potentially flexible interconnect solution. Arrays of vertically aligned multiwalled carbon nanotubes of approximately 200 μm in length were grown on silicon substrates, using low-temperature photothermal chemical vapor deposition. Oxygen plasma treatment was used to introduce defects, in the form of hydroxyl, carbonyl, and carboxyl groups, on the walls of the carbon nanotubes so that they could bond to palladium (Pd). Nanoparticle silver was then used to bind the Pd-coated multiwalled CNTs to a copper substrate. The silver-CNT-silver interconnects were found to be ohmic conductors, with resistivity of 6.2 × 10(-4) Ωm; the interconnects were heated to temperatures exceeding 300 °C (where common solders fail) and were found to maintain their electrical performance.

摘要

碳纳米管(CNTs)以互连的形式有许多潜在的应用,其在高温下的性能使它们具有独特的能力。我们展示了一种使用 CNT 和烧结银的新型传输工艺的开发,该工艺提供了一种独特的高温、高导电性、潜在的柔性互连解决方案。使用低温光热化学气相沉积在硅衬底上生长了大约 200 μm 长的垂直排列的多壁碳纳米管阵列。氧等离子体处理以羟基、羰基和羧基的形式在碳纳米管的壁上引入缺陷,以便它们可以与钯(Pd)键合。然后使用纳米颗粒银将涂钯的多壁 CNT 与铜衬底结合。发现银-CNT-银互连是欧姆导体,其电阻率为 6.2×10(-4)Ωm;互连被加热到超过 300°C 的温度(普通焊料失效的温度),并且被发现保持其电性能。

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