Wang Lingfang, Song Qianqian, Wu Jieyun, Chen Kaixin
Appl Opt. 2016 Feb 10;55(5):969-73. doi: 10.1364/AO.55.000969.
We propose a low-power variable optical attenuator based on the configuration of a hybrid silicon oxynitride (SiON)-polymer S-bend waveguide and two grooves in both sides of the S-bend waveguide core. With such a configuration, the opposite thermo-optic characteristics of SiON and polymer materials can be fully utilized. As a consequence, the heat utilization efficiency is increased. Theoretical simulation shows that an optical attenuation of ∼50 dB can be achieved with an applied electrical power of 3.6 mW. A typical fabricated device, which has a total length of 8 mm, shows a maximum optical attenuation of 46 dB with an applied electrical power of 16.2 mW and an insertion loss of 5.4 dB.
我们提出了一种基于混合氮氧化硅（SiON）-聚合物S形弯曲波导结构以及在S形弯曲波导芯两侧的两个凹槽的低功耗可变光衰减器。通过这种结构，可以充分利用SiON和聚合物材料相反的热光特性。因此，热利用效率得以提高。理论模拟表明，施加3.6 mW的电功率时可实现约50 dB的光衰减。一个典型的制造器件，其总长度为8 mm，在施加16.2 mW的电功率时显示出最大光衰减为46 dB，插入损耗为5.4 dB。
