通过空间光调制器的二维反射率调谐实现基于成像的振幅激光束整形用于材料加工。

Imaging-based amplitude laser beam shaping for material processing by 2D reflectivity tuning of a spatial light modulator.

作者信息

Li Jiangning, Kuang Zheng, Edwardson Stuart, Perrie Walter, Liu Dun, Dearden Geoff

出版信息

Appl Opt. 2016 Feb 10;55(5):1095-100. doi: 10.1364/AO.55.001095.

DOI:10.1364/AO.55.001095

Abstract

We have demonstrated an imaging-based amplitude laser-beam-shaping technique for material processing by 2D reflectivity tuning of a spatial light modulator. Intensity masks with 256 gray levels were designed to shape the input laser beam in the outline profile and inside intensity distribution. Squared and circular flattop beam shapes were obtained at the diffractive near-field and then reconstructed at an image plane of an f-theta lens (f∼100 mm). The observed intensity distribution inside the beam-shaping geometry was much more even than using binary masks. The ablation footprint well matches the desired beam shape.

摘要

我们展示了一种基于成像的振幅激光束整形技术，用于材料加工，该技术通过空间光调制器的二维反射率调谐来实现。设计了具有256个灰度级的强度掩膜，以在轮廓和内部强度分布方面对输入激光束进行整形。在衍射近场获得了方形和平顶圆形光束形状，然后在f-θ透镜（f ∼ 100 mm）的像平面上进行了重构。在光束整形几何结构内观察到的强度分布比使用二元掩膜时要均匀得多。烧蚀足迹与所需光束形状非常匹配。