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基于泽尼克多项式的超快激光空间光束整形用于表面加工。

Ultrafast laser spatial beam shaping based on Zernike polynomials for surface processing.

作者信息

Houzet J, Faure N, Larochette M, Brulez A-C, Benayoun S, Mauclair C

出版信息

Opt Express. 2016 Mar 21;24(6):6542-52. doi: 10.1364/OE.24.006542.

Abstract

In femtosecond laser machining, spatial beam shaping can be achieved with wavefront modulators. The wavefront modulator displays a pre-calculated phase mask that modulates the laser wavefront to generate a target intensity distribution in the processing plane. Due to the non-perfect optical response of wavefront modulators, the experimental distribution may significantly differ from the target, especially for continuous shapes. We propose an alternative phase mask calculation method that can be adapted to the phase modulator optical performance. From an adjustable number of Zernike polynomials according to this performance, a least square fitting algorithm numerically determines their coefficients to obtain the desired wavefront modulation. We illustrate the technique with an optically addressed liquid-crystal light valve to produce continuous intensity distributions matching a desired ablation profile, without the need of a wavefront sensor. The projection of the experimental laser distribution shows a 5% RMS error compared to the calculated one. Ablation of steel is achieved following user-defined micro-dimples and micro-grooves targets on mold surfaces. The profiles of the microgrooves and the injected polycarbonate closely match the target (RMS below 4%).

摘要

在飞秒激光加工中,可通过波前调制器实现空间光束整形。波前调制器显示一个预先计算好的相位掩膜,该掩膜调制激光波前,以在加工平面中生成目标强度分布。由于波前调制器的光学响应并非完美,实验分布可能与目标有显著差异,尤其是对于连续形状。我们提出了一种替代的相位掩膜计算方法,该方法可适应相位调制器的光学性能。根据此性能,从可调整数量的泽尼克多项式中,一种最小二乘拟合算法通过数值计算确定其系数,以获得所需的波前调制。我们用一个光寻址液晶光阀展示了该技术,以产生与所需烧蚀轮廓匹配的连续强度分布,而无需波前传感器。与计算出的激光分布相比,实验激光分布的投影显示均方根误差为5%。按照模具表面上用户定义的微凹坑和微槽目标实现了钢的烧蚀。微槽和注入的聚碳酸酯的轮廓与目标紧密匹配(均方根误差低于4%)。

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