Hofmann Meike, Xiao Yanfen, Sherman Stanislav, Gleissner Uwe, Schmidt Thomas, Zappe Hans
Appl Opt. 2016 Feb 10;55(5):1124-31. doi: 10.1364/AO.55.001124.
We report on the fabrication and characterization of integrated Mach-Zehnder interferometers in polymer foil without an interaction window. The interferometers are based on inverted rib waveguides, which allow single mode behavior even for waveguide widths larger than a few micrometers. The phase change between the two interferometer arms upon a refractive index change of the analyte that serves as the upper cladding is generated by the asymmetricity of the two interferometer arms. A difference of the waveguide width in the straight part of the interferometer leads to different effective refractive indices and thus to a change in the interference signal. We show in small scale the process chain, which is compatible with a cost-effective roll-to-roll fabrication process. For a proof of principle we apply deionized water and a glucose solution as analytes to the sensor foils and detect the transmitted intensity as a measure of the induced phase change. A detection limit of 3·10⁻³ refractive index units is reached for homogeneous sensing at a total system length of 9.3 mm and a total waveguide core thickness of 3 μm.
我们报道了无交互窗口的聚合物箔片中集成马赫-曾德尔干涉仪的制造与特性。这些干涉仪基于倒置肋形波导,即使对于宽度大于几微米的波导也能实现单模行为。用作上包层的分析物折射率发生变化时,两个干涉仪臂之间的相位变化是由两个干涉仪臂的不对称性产生的。干涉仪直线部分的波导宽度差异会导致不同的有效折射率,进而导致干涉信号发生变化。我们在小规模上展示了与具有成本效益的卷对卷制造工艺兼容的工艺流程。为了验证原理,我们将去离子水和葡萄糖溶液作为分析物施加到传感器箔片上,并检测透射强度作为诱导相位变化的度量。在总系统长度为9.3毫米且总波导芯厚度为3微米的情况下,均匀传感的检测限达到3·10⁻³ 折射率单位。