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本征可拉伸双相(固-液)薄金属膜。

Intrinsically Stretchable Biphasic (Solid-Liquid) Thin Metal Films.

机构信息

Bertarelli Foundation Chair in Neuroprosthetic Technology, Laboratory for Soft Bioelectronic Interfaces, Institute of Microengineering, Institute of Bioengineering, Centre for Neuroprosthetics, École Polytechnique Fédérale de Lausanne (EPFL), 1015, Lausanne, Switzerland.

出版信息

Adv Mater. 2016 Jun;28(22):4507-12. doi: 10.1002/adma.201506234. Epub 2016 Feb 29.

DOI:10.1002/adma.201506234
PMID:26923313
Abstract

Stretchable biphasic conductors are formed by physical vapor deposition of gallium onto an alloying metal film. The properties of the photolithography-compatible thin metal films are highlighted by low sheet resistance (0.5 Ω sq(-1) ) and large stretchability (400%). This novel approach to deposit and pattern liquid metals enables extremely robust, multilayer and soft circuits, sensors, and actuators.

摘要

通过物理气相沉积将镓沉积到合金金属薄膜上,形成了可拉伸的双相导体。这种光致抗蚀剂兼容的金属薄膜具有低面电阻(0.5 Ω/sq)和高拉伸性(400%)的特点,突出了其性能。这种新颖的沉积和图案化液态金属的方法可以实现极其坚固、多层和柔软的电路、传感器和执行器。

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