Mochizuki S, Mattei S, Nishida K, Hatayama A, Lettry J
Faculty of Science and Technology, Keio University, 3-14-1 Hiyoshi, Kohoku-ku, Yokohama 223-8522, Japan.
CERN, 1211, Geneva 23, Switzerland.
Rev Sci Instrum. 2016 Feb;87(2):02B108. doi: 10.1063/1.4932322.
To understand the Electron Energy Distribution Function (EEDF) in the Radio Frequency Inductively Coupled Plasmas (RF-ICPs) in hydrogen negative ion sources, the detailed analysis of the EEDFs using numerical simulation and the theoretical approach based on Boltzmann equation has been performed. It is shown that the EEDF of RF-ICPs consists of two parts, one is the low energy part which obeys Maxwellian distribution and the other is high energy part deviated from Maxwellian distribution. These simulation results have been confirmed to be reasonable by the analytical approach. The results suggest that it is possible to enhance the dissociation of molecules and the resultant H(-) negative ion production by reducing the gas pressure.
为了解氢负离子源中射频电感耦合等离子体（RF-ICP）的电子能量分布函数（EEDF），利用数值模拟和基于玻尔兹曼方程的理论方法对EEDF进行了详细分析。结果表明，RF-ICP的EEDF由两部分组成，一部分是服从麦克斯韦分布的低能部分，另一部分是偏离麦克斯韦分布的高能部分。这些模拟结果已通过分析方法得到证实是合理的。结果表明，通过降低气压有可能增强分子的离解和由此产生的H(-)负离子的产生。
