Shibata T, Koga S, Terasaki R, Inoue T, Dairaku M, Kashiwagi M, Taniguchi M, Tobari H, Tsuchida K, Umeda N, Watanabe K, Hatayama A
Graduate School of Science and Technology, Keio University, 3-14-1 Hiyoshi, Yokohama 223-8522, Japan.
Rev Sci Instrum. 2012 Feb;83(2):02A719. doi: 10.1063/1.3673485.
Spatially non-uniform electron energy distribution function (EEDF) in an arc driven negative ion source (JAEA 10A negative ion source: 10 A NIS) is calculated numerically by a three-dimensional Monte Carlo kinetic model for electrons to understand spatial distribution of plasma production (such as atomic and ionic hydrogen (H(0)∕H(+)) production) in source chamber. The local EEDFs were directly calculated from electron orbits including electromagnetic effects and elastic∕inelastic collision forces. From the EEDF, spatial distributions of H(0)∕H(+) production rate were obtained. The results suggest that spatial non-uniformity of H(0)∕H(+) productions is enhanced by high energy component of EEDF.
通过电子的三维蒙特卡罗动力学模型，对电弧驱动负离子源（日本原子能机构10A负离子源：10A NIS）中的空间非均匀电子能量分布函数（EEDF）进行了数值计算，以了解源腔中等离子体产生（如原子氢和离子氢（H(0)/H(+)）产生）的空间分布。局部EEDF是根据包含电磁效应和弹性/非弹性碰撞力的电子轨道直接计算得出的。从EEDF中，获得了H(0)/H(+)产生率的空间分布。结果表明，EEDF的高能成分增强了H(0)/H(+)产生的空间非均匀性。
