非均匀电子能量分布函数对大弧驱动负离子源中等离子体产生的影响。

Effect of non-uniform electron energy distribution function on plasma production in large arc driven negative ion source.

作者信息

Shibata T, Koga S, Terasaki R, Inoue T, Dairaku M, Kashiwagi M, Taniguchi M, Tobari H, Tsuchida K, Umeda N, Watanabe K, Hatayama A

机构信息

Graduate School of Science and Technology, Keio University, 3-14-1 Hiyoshi, Yokohama 223-8522, Japan.

出版信息

Rev Sci Instrum. 2012 Feb;83(2):02A719. doi: 10.1063/1.3673485.

DOI:10.1063/1.3673485

PMID:22380228

Abstract

Spatially non-uniform electron energy distribution function (EEDF) in an arc driven negative ion source (JAEA 10A negative ion source: 10 A NIS) is calculated numerically by a three-dimensional Monte Carlo kinetic model for electrons to understand spatial distribution of plasma production (such as atomic and ionic hydrogen (H(0)∕H(+)) production) in source chamber. The local EEDFs were directly calculated from electron orbits including electromagnetic effects and elastic∕inelastic collision forces. From the EEDF, spatial distributions of H(0)∕H(+) production rate were obtained. The results suggest that spatial non-uniformity of H(0)∕H(+) productions is enhanced by high energy component of EEDF.

摘要

通过电子的三维蒙特卡罗动力学模型，对电弧驱动负离子源（日本原子能机构10A负离子源：10A NIS）中的空间非均匀电子能量分布函数（EEDF）进行了数值计算，以了解源腔中等离子体产生（如原子氢和离子氢（H(0)/H(+)）产生）的空间分布。局部EEDF是根据包含电磁效应和弹性/非弹性碰撞力的电子轨道直接计算得出的。从EEDF中，获得了H(0)/H(+)产生率的空间分布。结果表明，EEDF的高能成分增强了H(0)/H(+)产生的空间非均匀性。