Xu W, Dycus J H, Sang X, LeBeau J M
Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695, USA.
Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695, USA.
Ultramicroscopy. 2016 May;164:51-61. doi: 10.1016/j.ultramic.2016.02.004. Epub 2016 Mar 2.
Here we report a numerical approach to model a four quadrant energy dispersive X-ray spectrometer in the transmission electron microscope. The model includes detector geometries, specimen position and absorption, shadowing by the holder, and filtering by the Be carrier. We show that this comprehensive model accurately predicts absolute counts and intensity ratios as a function of specimen tilt and position. We directly compare the model to experimental results acquired with a FEI Super-X EDS four quadrant detector. The contribution from each detector to the sum is investigated. The program and source code can be downloaded from https://github.com/subangstrom/superAngle.
在此，我们报告一种用于对透射电子显微镜中的四象限能量色散X射线光谱仪进行建模的数值方法。该模型包括探测器几何结构、样品位置和吸收、样品杆的阴影效应以及铍载体的滤波作用。我们表明，这个综合模型能够准确预测作为样品倾斜度和位置函数的绝对计数和强度比。我们将该模型与使用FEI Super-X EDS四象限探测器获得的实验结果进行了直接比较。研究了每个探测器对总和的贡献。该程序和源代码可从https://github.com/subangstrom/superAngle下载。
