Microelectronics Research Center, Department of Electrical and Computer Engineering, The University of Texas at Austin , Austin, Texas 78758, United States.
Nano Lett. 2016 Apr 13;16(4):2301-6. doi: 10.1021/acs.nanolett.5b04768. Epub 2016 Mar 18.
Black phosphorus (BP) has attracted rapidly growing attention for high speed and low power nanoelectronics owing to its compelling combination of tunable bandgap (0.3 to 2 eV) and high carrier mobility (up to ∼1000 cm(2)/V·s) at room temperature. In this work, we report the first radio frequency (RF) flexible top-gated (TG) BP thin-film transistors on highly bendable polyimide substrate for GHz nanoelectronic applications. Enhanced p-type charge transport with low-field mobility ∼233 cm(2)/V·s and current density of ∼100 μA/μm at VDS = -2 V were obtained from flexible BP transistor at a channel length L = 0.5 μm. Importantly, with optimized dielectric coating for air-stability during microfabrication, flexible BP RF transistors afforded intrinsic maximum oscillation frequency fMAX ∼ 14.5 GHz and unity current gain cutoff frequency fT ∼ 17.5 GHz at a channel length of 0.5 μm. Notably, the experimental fT achieved here is at least 45% higher than prior results on rigid substrate, which is attributed to the improved air-stability of fabricated BP devices. In addition, the high-frequency performance was investigated through mechanical bending test up to ∼1.5% tensile strain, which is ultimately limited by the inorganic dielectric film rather than the 2D material. Comparison of BP RF devices to other 2D semiconductors clearly indicates that BP offers the highest saturation velocity, an important metric for high-speed and RF flexible nanosystems.
黑磷(BP)由于其在室温下可调带隙(0.3 至 2eV)和高载流子迁移率(高达约 1000cm2/V·s)的引人注目的组合,在高速和低功耗纳米电子学领域引起了迅速的关注。在这项工作中,我们报告了首例在高度可弯曲聚酰亚胺衬底上的射频(RF)柔性顶栅(TG)BP 薄膜晶体管,用于 GHz 纳米电子应用。在柔性 BP 晶体管中,通过优化用于微制造过程中的空气稳定性的介电涂层,获得了低场迁移率约为 233cm2/V·s 和在 VDS = -2V 时电流密度约为 100μA/μm 的增强 p 型电荷输运。重要的是,在 0.5μm 的沟道长度下,柔性 BP RF 晶体管具有固有最大振荡频率 fMAX∼14.5GHz 和单位电流增益截止频率 fT∼17.5GHz。值得注意的是,这里实验获得的 fT 比刚性衬底上的先前结果至少高 45%,这归因于制造的 BP 器件的空气稳定性得到了改善。此外,通过高达约 1.5%拉伸应变的机械弯曲测试研究了高频性能,这最终受到无机介电膜而不是 2D 材料的限制。将 BP RF 器件与其他 2D 半导体进行比较清楚地表明,BP 提供了最高的饱和速度,这是高速和 RF 柔性纳米系统的重要指标。