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用于柔性纳米电子学的高性能化学气相沉积双层二硫化钼射频晶体管和千兆赫兹混频器。

High-Performance CVD Bilayer MoS Radio Frequency Transistors and Gigahertz Mixers for Flexible Nanoelectronics.

作者信息

Gao Qingguo, Zhang Chongfu, Yang Kaiqiang, Pan Xinjian, Zhang Zhi, Yang Jianjun, Yi Zichuan, Chi Feng, Liu Liming

机构信息

School of Electronic Information, University of Electronic Science and Technology of China, Zhongshan Institute, Zhongshan 528402, China.

School of Information and Communication Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China.

出版信息

Micromachines (Basel). 2021 Apr 16;12(4):451. doi: 10.3390/mi12040451.

Abstract

Two-dimensional (2D) MoS have attracted tremendous attention due to their potential applications in future flexible high-frequency electronics. Bilayer MoS exhibits the advantages of carrier mobility when compared with monolayer mobility, thus making the former more suitable for use in future flexible high-frequency electronics. However, there are fewer systematical studies of chemical vapor deposition (CVD) bilayer MoS radiofrequency (RF) transistors on flexible polyimide substrates. In this work, CVD bilayer MoS RF transistors on flexible substrates with different gate lengths and gigahertz flexible frequency mixers were constructed and systematically studied. The extrinsic cutoff frequency () and maximum oscillation frequency () increased with reducing gate lengths. From transistors with a gate length of 0.3 μm, we demonstrated an extrinsic of 4 GHz and of 10 GHz. Furthermore, statistical analysis of 14 flexible MoS RF transistors is presented in this work. The study of a flexible mixer demonstrates the dependence of conversion gain versus gate voltage, LO power and input signal frequency. These results present the potential of CVD bilayer MoS for future flexible high-frequency electronics.

摘要

二维(2D)二硫化钼因其在未来柔性高频电子器件中的潜在应用而备受关注。与单层二硫化钼相比,双层二硫化钼具有载流子迁移率方面的优势,因此使其更适合用于未来的柔性高频电子器件。然而,关于在柔性聚酰亚胺衬底上通过化学气相沉积(CVD)制备双层二硫化钼射频(RF)晶体管的系统研究较少。在这项工作中,构建了具有不同栅长的柔性衬底上的CVD双层二硫化钼RF晶体管以及千兆赫兹柔性频率混频器,并进行了系统研究。随着栅长的减小,外部截止频率()和最大振荡频率()增加。从栅长为0.3μm的晶体管中,我们展示了4GHz的外部和10GHz的。此外,这项工作还给出了对14个柔性二硫化钼RF晶体管的统计分析。对柔性混频器的研究表明了变频增益与栅极电压、本振功率和输入信号频率之间的关系。这些结果展示了CVD双层二硫化钼在未来柔性高频电子器件中的潜力。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ba95/8072592/c38ec15422d9/micromachines-12-00451-g001.jpg

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