Payne W Vance, Geist Jon
Building and Fire Research Laboratory National Institute of Standards and Technology, Gaithersburg, MD 20899-8631.
National Institute of Standards and Technology, Gaithersburg, MD 20899-8120.
J Res Natl Inst Stand Technol. 2007 Apr 1;112(2):115-28. doi: 10.6028/jres.112.009. Print 2007 Mar-Apr.
This report describes the development of a low cost, digital Micro Electro Mechanical System (MEMS) vibration meter that reports an approximation to the RMS acceleration of the vibration to which the vibration meter is subjected. The major mechanical element of this vibration meter is a cantilever beam, which is on the order of 500 µm in length, with a piezoresistor deposited at its base. Vibration of the device in the plane perpendicular to the cantilever beam causes it to bend, which produces a measurable change in the resistance of a piezoresistor. These changes in resistance along with a unique signal-processing scheme are used to determine an approximation to the RMS acceleration sensed by the device.
本报告描述了一种低成本数字微机电系统（MEMS）振动计的开发，该振动计可报告其所处振动的均方根加速度近似值。该振动计的主要机械元件是一根悬臂梁，其长度约为500微米，在其底部沉积有一个压阻器。设备在垂直于悬臂梁的平面内振动会使其弯曲，从而导致压阻器的电阻产生可测量的变化。这些电阻变化与独特的信号处理方案一起用于确定设备所感测到的均方根加速度的近似值。
