Wang Yu-Hsiang, Lee Chia-Yen, Chiang Che-Ming
Department of Mechanical and Automation Engineering, Da-Yeh University, Changhua, Taiwan.
Department of Architecture, National Cheng Kung University, Tainan, Taiwan 701.
Sensors (Basel). 2007 Oct 17;7(10):2389-2401. doi: 10.3390/s7102389.
This paper presents a micro-scale air flow sensor based on a free-standingcantilever structure. In the fabrication process, MEMS techniques are used to deposit asilicon nitride layer on a silicon wafer. A platinum layer is deposited on the silicon nitridelayer to form a piezoresistor, and the resulting structure is then etched to create afreestanding micro-cantilever. When an air flow passes over the surface of the cantileverbeam, the beam deflects in the downward direction, resulting in a small variation in theresistance of the piezoelectric layer. The air flow velocity is determined by measuring thechange in resistance using an external LCR meter. The experimental results indicate that theflow sensor has a high sensitivity (0.0284 ω/ms), a high velocity measurement limit (45ms) and a rapid response time (0.53 s).
本文介绍了一种基于独立悬臂结构的微型气流传感器。在制造过程中，采用微机电系统（MEMS）技术在硅片上沉积一层氮化硅。在氮化硅层上沉积一层铂以形成压阻器，然后对所得结构进行蚀刻以制造独立的微悬臂。当气流通过悬臂梁表面时，梁向下偏转，导致压电层电阻发生微小变化。通过使用外部LCR仪表测量电阻变化来确定气流速度。实验结果表明，该流量传感器具有高灵敏度（0.0284ω/ms）、高速度测量极限（45ms）和快速响应时间（0.53s）。
