Zou R, Wang M, Wang S L, Li S, Zhang C, Deng L, Lu Y F, Chen K P
Opt Express. 2017 Feb 20;25(4):3875-3883. doi: 10.1364/OE.25.003875.
Laser shock micro-forming is a non-thermal laser forming method that uses laser-induced shockwave to modify surface properties and to adjust shapes and geometry of work pieces. The magnitude and spatial distribution of the laser-induced shockwaves depend on the energy profiles of the laser beam focused on sample surfaces. In this paper, we present an adaptive optical technique to engineer spatial profiles of laser beams to control the shapes, sizes, and locations of the laser-induced shockwaves and the resulting forming features. Using a spatial light modulator, this adaptive laser beam forming tool was used to process free-standing MEMS structures in aluminum, which has led to highly uniform forming features. Shockwave simultaneously excited by multiple laser beams generated by the spatial light modulator and its effects on the micro-forming process were also studied. The results presented in this paper show that the adaptive optics laser beam forming is an effective and flexible method to generate shockwave with various shapes and sizes of wavefront and at multiple locations for laser processing at microscales.
激光冲击微成型是一种非热激光成型方法，它利用激光诱导的冲击波来改变表面性能，并调整工件的形状和几何尺寸。激光诱导冲击波的强度和空间分布取决于聚焦在样品表面的激光束的能量分布。在本文中，我们提出了一种自适应光学技术，用于设计激光束的空间分布，以控制激光诱导冲击波的形状、大小和位置以及由此产生的成型特征。使用空间光调制器，这种自适应激光束成型工具被用于加工铝制的独立微机电系统结构，从而产生了高度均匀的成型特征。还研究了由空间光调制器产生的多束激光同时激发的冲击波及其对微成型过程的影响。本文给出的结果表明，自适应光学激光束成型是一种有效且灵活的方法，可在微观尺度上的激光加工中，在多个位置产生具有各种形状和大小波前的冲击波。
