School of Semiconductor and Chemical Engineering, Semiconductor Physics Research Center, Chonbuk National University, Jeonju 54896, Korea.
Nanotechnology. 2016 Jul 8;27(27):275602. doi: 10.1088/0957-4484/27/27/275602. Epub 2016 May 27.
Using single-walled carbon nanotubes (SWCNTs) as nanomasks on an undoped GaN template, a significant biaxial stress relaxation was achieved in the subsequently-grown Si-doped n-GaN layer. Enhanced near band edge (NBE) emission intensity, similar free carrier concentrations, and the reduced peak width of the asymmetric (102) crystallographic plane all confirmed the suppression of threading dislocations due to the nanoepitaxial growth process. Temperature-dependent photoluminescence (PL) revealed improved internal quantum efficiency (IQE) of InGaN/GaN multi-quantum wells (MQWs) grown on this n-GaN layer. Furthermore, enhanced light output power and a remarkable reduction in efficiency droop were observed for the blue light-emitting diodes (LEDs), especially at higher injection currents. Our results emphasize the strong potential for SWCNTs as nanomasks in the heteroepitaxy of GaN-based devices without the exploitation of complicated lithography or etching processes.
使用单壁碳纳米管 (SWCNTs) 作为未掺杂 GaN 模板上的纳米掩模,随后生长的 Si 掺杂 n-GaN 层实现了显著的双轴应弛豫。增强的近带边 (NBE) 发射强度、相似的自由载流子浓度以及不对称 (102) 晶面的峰宽减小都证实了由于纳米外延生长过程,位错的抑制。温度依赖的光致发光 (PL) 表明,在这种 n-GaN 层上生长的 InGaN/GaN 多量子阱 (MQWs) 的内量子效率 (IQE) 得到了提高。此外,对于蓝光发光二极管 (LED),观察到光输出功率的增强和效率下降的显著减少,尤其是在更高的注入电流下。我们的结果强调了 SWCNTs 在 GaN 基器件异质外延中作为纳米掩模的强大潜力,而无需利用复杂的光刻或刻蚀工艺。