基于不规则微凸结构的高灵敏度可穿戴压阻式压力传感器及其在人体运动感应中的应用。
High Sensitivity, Wearable, Piezoresistive Pressure Sensors Based on Irregular Microhump Structures and Its Applications in Body Motion Sensing.
机构信息
Department of Mechanical Engineering, The University of Hong Kong, Hong Kong.
State Key Lab of Silicon Materials, School of Materials Science and Engineering, Zhejiang University, Hangzhou, 310027, China.
出版信息
Small. 2016 Jul;12(28):3827-36. doi: 10.1002/smll.201601419. Epub 2016 Jun 9.
UNLABELLED
A pressure sensor based on irregular microhump patterns has been proposed and developed. The devices show high sensitivity and broad operating pressure regime while comparing with regular micropattern devices. Finite element analysis (FEA) is utilized to confirm the sensing mechanism and predict the performance of the pressure sensor based on the microhump structures. Silicon carbide sandpaper is employed as the mold to develop polydimethylsiloxane (PDMS) microhump patterns with various sizes. The active layer of the piezoresistive pressure sensor is developed by spin coating
PEDOT
PSS on top of the patterned PDMS. The devices show an averaged sensitivity as high as 851 kPa(-1) , broad operating pressure range (20 kPa), low operating power (100 nW), and fast response speed (6.7 kHz). Owing to their flexible properties, the devices are applied to human body motion sensing and radial artery pulse. These flexible high sensitivity devices show great potential in the next generation of smart sensors for robotics, real-time health monitoring, and biomedical applications.
摘要：提出并开发了一种基于不规则微凸台图案的压力传感器。与规则微图案器件相比，该器件具有高灵敏度和较宽的工作压力范围。利用有限元分析（FEA）来确认基于微凸台结构的压力传感器的传感机制和预测性能。碳化硅砂纸被用作模具，以开发具有各种尺寸的聚二甲基硅氧烷（PDMS）微凸台图案。压阻式压力传感器的有源层是通过旋涂PEDOT：PSS 在图案化的 PDMS 顶部而开发的。该器件的平均灵敏度高达 851 kPa(-1) ，工作压力范围较宽（20 kPa），工作功率低（100 nW），响应速度快（6.7 kHz）。由于其柔性特性，该器件还应用于人体运动感应和桡动脉脉搏检测。这些具有高灵敏度的柔性器件在下一代用于机器人技术、实时健康监测和生物医学应用的智能传感器中具有很大的应用潜力。
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