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基于具有随机高度微金字塔结构的聚(3,4-乙撑二氧噻吩):聚苯乙烯磺酸盐(PEDOT:PSS)薄膜在聚二甲基硅氧烷(PDMS)上的电阻式压力传感器的灵敏度增强。

Enhanced Sensitivity of a Resistive Pressure Sensor Based on a PEDOT:PSS Thin Film on PDMS with a Random-Height Micropyramid Structure.

作者信息

Kim Sungyong, Kim Dae Yu

机构信息

Department of Electrical and Computer Engineering, College of Engineering, Inha University, Incheon 22212, Korea.

Center for Sensor Systems, Inha University, Incheon 22212, Republic of Korea.

出版信息

Micromachines (Basel). 2024 Aug 31;15(9):1110. doi: 10.3390/mi15091110.

Abstract

The use of flexible pressure sensors has become increasingly widespread in a variety of applications, including wearable electronics and electronic skin. These sensors need to exhibit high sensitivity, wide detection limits, a fast response time, a linear response, and mechanical stability. In this study, we demonstrate a resistive pressure sensor based on randomly arranged micropyramid polydimethylsiloxane (PDMS) with a conductive poly(3,4-ethylenedioxythiophene): polystyrenesulfonate (PEDOT:PSS) thin film with a sensitivity of 391 kPa, a response time of 52.91 ms, a recovery time of 4.38 ms, and a limit of detection (LOD) of 0.35 kPa. Electrodes are then connected to a pair of the proposed resistive pressure sensors that face each other to fabricate a pressure sensing device. We examine various characteristics of the fabricated device, including the changes observed when applying loads ranging from 0 to 2.58 kPa. The proposed sensor exhibits high sensitivity and a rapid response time.

摘要

柔性压力传感器在包括可穿戴电子设备和电子皮肤在内的各种应用中越来越广泛地得到使用。这些传感器需要具备高灵敏度、宽检测范围、快速响应时间、线性响应和机械稳定性。在本研究中,我们展示了一种基于随机排列的微金字塔聚二甲基硅氧烷(PDMS)与导电聚(3,4-乙撑二氧噻吩):聚苯乙烯磺酸盐(PEDOT:PSS)薄膜的电阻式压力传感器,其灵敏度为391 kPa,响应时间为52.91 ms,恢复时间为4.38 ms,检测限(LOD)为0.35 kPa。然后将电极连接到一对相互面对的所提出的电阻式压力传感器上,以制造一个压力传感装置。我们研究了所制造装置的各种特性,包括在施加0至2.58 kPa负载时观察到的变化。所提出的传感器具有高灵敏度和快速响应时间。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/79b8/11434580/1a66532ec7b0/micromachines-15-01110-g001.jpg

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