Ma Wei, Jia Delin, Wen Yongzheng, Yu Xiaomei, Feng Yun, Zhao Yuejin
Opt Lett. 2016 Jul 1;41(13):2974-7. doi: 10.1364/OL.41.002974.
This Letter reports a microbolometer integrated with a broadband metamaterial absorber (MMA) to enhance its performance, which contains series-connected silicon diodes as the temperature sensor. The broadband MMA is readily integrated into the device by introducing an array of different-sized square resonators on the silicon nitride structural layer, while the widened titanium interconnecting wires between individual diodes serve as the ground plane. In a comparative experiment, the broadband MMA was demonstrated to be superior to the ordinary silicon nitride absorber in a broad spectra range, especially in a long-wavelength IR regime, which directly leads to an increase in IR responsivity by 60%. More importantly, this enhancement in responsivity was achieved with no sacrifice of the response time due to the negligible thermal mass of the introduced resonator array.
本信函报道了一种集成有宽带超材料吸收器（MMA）以提高其性能的微测辐射热计，该微测辐射热计包含串联的硅二极管作为温度传感器。通过在氮化硅结构层上引入不同尺寸的方形谐振器阵列，宽带MMA很容易集成到该器件中，而各个二极管之间加宽的钛互连线用作接地平面。在对比实验中，宽带MMA在宽光谱范围内被证明优于普通的氮化硅吸收器，尤其是在长波长红外区域，这直接导致红外响应率提高了60%。更重要的是，由于引入的谐振器阵列的热质量可忽略不计，在不牺牲响应时间的情况下实现了响应率的这种提高。
