Qiu Lirong, Xiao Yang, Zhao Weiqian
Opt Express. 2016 May 30;24(11):12013-25. doi: 10.1364/OE.24.012013.
This paper proposes a laser differential confocal cylindrical radius of curvature measurement (DCCRM) method for high accuracy measurement of the radius of curvature of the cylindrical lens. Based on the property that the null point of an axial intensity curve precisely corresponds to the focus of the objective in a differential confocal system (DCS), the DCCRM uses the null point of the DCS axial intensity curve to precisely identify the cat's eye position and confocal position of the test cylindrical lens. The distance between the two positions is measured accurately using a laser distance instrument, thus achieving high precision radius measurement. In comparison with existing measurement methods, the proposed DCCRM has high measurement precision and strong environmental anti-interference capability. Theoretical analyses and preliminary experimental results indicate that the DCCRM has a relative measurement uncertainty of better than 0.03% and provides a new approach for a high precision radius measurement of the cylindrical lens.
本文提出了一种用于高精度测量柱面透镜曲率半径的激光差分共焦圆柱曲率半径测量(DCCRM)方法。基于差分共焦系统(DCS)中轴向强度曲线的零点精确对应物镜焦点的特性,DCCRM利用DCS轴向强度曲线的零点精确识别被测柱面透镜的猫眼位置和共焦位置。使用激光测距仪精确测量这两个位置之间的距离,从而实现高精度的半径测量。与现有测量方法相比,所提出的DCCRM具有高测量精度和强环境抗干扰能力。理论分析和初步实验结果表明,DCCRM的相对测量不确定度优于0.03%,为柱面透镜的高精度半径测量提供了一种新方法。