Xiao Yang, Qiu Lirong, Zhao Weiqian
Appl Opt. 2017 Aug 10;56(23):6596-6602. doi: 10.1364/AO.56.006596.
This paper proposes a laser confocal cylindrical radius of the curvature measurement (CCRM) method. The CCRM method precisely identifies the positions of the vertex and curvature center of the test cylindrical surface by using the property so that the maximum point of the laser confocal axial intensity curve precisely corresponds to the focus of the laser confocal measurement system, and the accurate distance of these two positions is obtained by the distance measuring instrument, thus achieving the precise measurement of the cylindrical radius. The quadratic fitting method is used to further improve the measurement accuracy. Compared with existing measurement methods, the CCRM method has high measurement precision, simple structure, and strong environmental interference capability, and it is more suitable for engineering applications. Based on the CCRM, the CCRM system is established, and theoretical analysis and preliminary experiments indicate that the relative uncertainty of cylindrical radius measurement is better than 0.045%. Therefore, the CCRM provides an effective approach for the high-precision measurement of cylindrical radius.
本文提出了一种激光共焦圆柱曲率半径测量（CCRM）方法。该CCRM方法利用激光共焦轴向强度曲线的最大值点精确对应激光共焦测量系统焦点这一特性，精确识别被测圆柱面顶点和曲率中心的位置，并通过测距仪获取这两个位置的准确距离，从而实现圆柱半径的精确测量。采用二次拟合方法进一步提高测量精度。与现有测量方法相比，CCRM方法测量精度高、结构简单、抗环境干扰能力强，更适合工程应用。基于CCRM方法建立了CCRM系统，理论分析和初步实验表明，圆柱半径测量的相对不确定度优于0.045%。因此，CCRM方法为圆柱半径的高精度测量提供了一种有效途径。
