Zhao Weiqian, Sun Ruoduan, Qiu Lirong, Sha Dingguo
Key Laboratory of Photoelectronic Imaging Technology and System Ministry of Education of China,Opto-Electronic College, Beijing Institute of Technology, Beijing 100081, China.
Opt Express. 2010 Feb 1;18(3):2345-60. doi: 10.1364/OE.18.002345.
A new laser differential confocal radius measurement (DCRM) is proposed for high precision measurement of radius. Based on the property of an axial intensity curve that the absolute zero precisely corresponds to the focus of the objective in a differential confocal system (DCS), DCRM uses the zero point of the DCS axial intensity curve to precisely identify the cat's-eye and confocal positions of the test lens, and measures the accurate distance between the two positions to achieve the high-precision measurement of radius of curvature (ROC). In comparison with the existing measurement methods, DCRM proposed has a high measurement precision, a strong environmental anti-interference capability and a low cost. The theoretical analyses and preliminary experimental results indicate that DCRM has a relative measurement error of better than 5 ppm.
提出了一种用于高精度半径测量的新型激光差分共焦半径测量（DCRM）方法。基于差分共焦系统（DCS）中轴向强度曲线的特性，即绝对零点精确对应于物镜的焦点，DCRM利用DCS轴向强度曲线的零点精确识别被测透镜的猫眼和共焦位置，并测量这两个位置之间的精确距离，以实现曲率半径（ROC）的高精度测量。与现有测量方法相比，所提出的DCRM具有测量精度高、环境抗干扰能力强和成本低的特点。理论分析和初步实验结果表明，DCRM的相对测量误差优于5 ppm。
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