Departamento de Física, Universidad de Santiago de Chile and Center for the Development of Nanoscience and Nanotechnology, 9170124 Santiago, Chile. Institute of Nanostructure and Solid State Physics, Universität Hamburg, Jungiusstr. 11, D-20335 Hamburg, Germany.
Nanotechnology. 2016 Aug 26;27(34):345707. doi: 10.1088/0957-4484/27/34/345707. Epub 2016 Jul 25.
Nickel-rich NiFe thin films (Ni92Fe8, Ni89Fe11 and Ni83Fe17) were prepared by combining atomic layer deposition (ALD) with a subsequent thermal reduction process. In order to obtain Ni x Fe1-x O y films, one ALD supercycle was performed according to the following sequence: m NiCp2/O3, with m = 1, 2 or 3, followed by one FeCp2/O3 cycle. The supercycle was repeated n times. The thermal reduction process in hydrogen atmosphere was investigated by in situ x-ray diffraction studies as a function of temperature. The metallic nickel iron alloy thin films were investigated and characterized with respect to crystallinity, morphology, resistivity, and magnetism. As proof-of-concept magnetic properties of an array of Ni83Fe17, close to the perfect Permalloy stoichiometry, nanotubes and an isolated tube were investigated.
镍富镍铁薄膜（Ni92Fe8、Ni89Fe11 和 Ni83Fe17）通过原子层沉积（ALD）与随后的热还原过程相结合制备而成。为了获得 Ni x Fe1-x O y 薄膜，按照以下顺序进行一个 ALD 超循环：m NiCp2/O3，其中 m=1、2 或 3，然后进行一个 FeCp2/O3 循环。该超循环重复 n 次。通过原位 X 射线衍射研究，研究了在氢气气氛中的热还原过程，作为温度的函数。对金属镍铁合金薄膜进行了结晶度、形态、电阻率和磁性方面的研究和表征。作为概念验证，研究了接近完美坡莫合金化学计量比的 Ni83Fe17 纳米管阵列和孤立管的磁性。
