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基于聚焦电子束诱导沉积和自催化生长工艺制备的铁纳米结构的磁性研究。

On the magnetic properties of iron nanostructures fabricated via focused electron beam induced deposition and autocatalytic growth processes.

机构信息

Lehrstuhl für Physikalische Chemie II and Interdisciplinary Center for Molecular Materials (ICMM), Universität Erlangen-Nürnberg (FAU), Egerlandstr. 3, D-91058 Erlangen, Germany.

出版信息

Nanotechnology. 2016 Sep 2;27(35):355302. doi: 10.1088/0957-4484/27/35/355302. Epub 2016 Jul 25.

Abstract

We employ Electron beam induced deposition (EBID) in combination with autocatalytic growth (AG) processes to fabricate magnetic nanostructures with controllable shapes and thicknesses. Following this route, different Fe deposits were prepared on silicon nitride membranes under ultra-high vacuum conditions and studied by scanning electron microscopy (SEM) and scanning transmission x-ray microspectroscopy (STXM). The originally deposited Fe nanostructures are composed of pure iron, especially when fabricated via autocatalytic growth processes. Quantitative near-edge x-ray absorption fine structure (NEXAFS) spectroscopy was employed to derive information on the thickness dependent composition. X-ray magnetic circular dichroism (XMCD) in STXM was used to derive the magnetic properties of the EBID prepared structures. STXM and XMCD analysis evinces the existence of a thin iron oxide layer at the deposit-vacuum interface, which is formed during exposure to ambient conditions. We were able to extract magnetic hysteresis loops for individual deposits from XMCD micrographs with varying external magnetic field. Within the investigated thickness range (2-16 nm), the magnetic coercivity, as evaluated from the width of the hysteresis loops, increases with deposit thickness and reaches a maximum value of ∼160 Oe at around 10 nm. In summary, we present a viable technique to fabricate ferromagnetic nanostructures in a controllable way and gain detailed insight into their chemical and magnetic properties.

摘要

我们采用电子束诱导沉积(EBID)与自催化生长(AG)工艺相结合的方法,制备出具有可控形状和厚度的磁性纳米结构。通过这种方法,我们在超高真空条件下于氮化硅膜上制备了不同的铁沉积物,并通过扫描电子显微镜(SEM)和扫描透射 X 射线微谱(STXM)进行了研究。最初沉积的铁纳米结构由纯铁组成,特别是通过自催化生长工艺制备的铁纳米结构。我们采用近边 X 射线吸收精细结构(NEXAFS)光谱定量分析了厚度依赖的成分信息。在 STXM 中采用 X 射线磁圆二色性(XMCD)来推导 EBID 制备结构的磁性能。STXM 和 XMCD 分析表明,在暴露于环境条件时,在沉积物-真空界面处形成了一层薄的氧化铁层。我们能够从具有不同外磁场的 XMCD 显微图像中为各个沉积物提取磁滞回线。在所研究的厚度范围内(2-16nm),磁矫顽力(从磁滞回线的宽度评估得到)随沉积物厚度的增加而增加,并在约 10nm 时达到约 160Oe 的最大值。总之,我们提出了一种可行的技术,能够以可控的方式制备铁磁纳米结构,并深入了解它们的化学和磁学性质。

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