Yao Zong, Liang Ting, Jia Pinggang, Hong Yingping, Qi Lei, Lei Cheng, Zhang Bin, Li Wangwang, Zhang Diya, Xiong Jijun
National Key Laboratory for Electronic Measurement Technology, North University of China, Taiyuan 030051, China.
Key Laboratory for Instrumentation Science & Dynamic Measurement, North University of China, Ministry of Education, Taiyuan 030051, China.
Sensors (Basel). 2016 Jul 22;16(7):1142. doi: 10.3390/s16071142.
The main limitation of high-temperature piezoresistive pressure sensors is the variation of output voltage with operating temperature, which seriously reduces their measurement accuracy. This paper presents a passive resistor temperature compensation technique whose parameters are calculated using differential equations. Unlike traditional experiential arithmetic, the differential equations are independent of the parameter deviation among the piezoresistors of the microelectromechanical pressure sensor and the residual stress caused by the fabrication process or a mismatch in the thermal expansion coefficients. The differential equations are solved using calibration data from uncompensated high-temperature piezoresistive pressure sensors. Tests conducted on the calibrated equipment at various temperatures and pressures show that the passive resistor temperature compensation produces a remarkable effect. Additionally, a high-temperature signal-conditioning circuit is used to improve the output sensitivity of the sensor, which can be reduced by the temperature compensation. Compared to traditional experiential arithmetic, the proposed passive resistor temperature compensation technique exhibits less temperature drift and is expected to be highly applicable for pressure measurements in harsh environments with large temperature variations.
高温压阻式压力传感器的主要局限性在于输出电压随工作温度的变化，这严重降低了它们的测量精度。本文提出了一种无源电阻温度补偿技术，其参数通过微分方程计算得出。与传统的经验算法不同，这些微分方程与微机电压力传感器的压阻器之间的参数偏差以及制造工艺引起的残余应力或热膨胀系数不匹配无关。利用未补偿的高温压阻式压力传感器的校准数据来求解这些微分方程。在不同温度和压力下的校准设备上进行的测试表明，无源电阻温度补偿产生了显著效果。此外，使用高温信号调理电路来提高传感器的输出灵敏度，该灵敏度可能会因温度补偿而降低。与传统经验算法相比，所提出的无源电阻温度补偿技术具有更小的温度漂移，有望高度适用于温度变化较大的恶劣环境中的压力测量。
