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基于金属-绝缘体-金属(MIM)等离子体波导的马赫-曾德尔干涉仪的设计优化与制作

Design optimization and fabrication of Mach- Zehnder interferometer based on MIM plasmonic waveguides.

作者信息

Kamada Shun, Okamoto Toshihiro, El-Zohary Salah E, Haraguchi Masanobu

出版信息

Opt Express. 2016 Jul 25;24(15):16224-31. doi: 10.1364/OE.24.016224.

Abstract

We proposed and designed a compact unbalanced Mach-Zehnder interferometer (MZI) based on metal/insulator/metal (MIM) plasmonic waveguides for ultrafast optical signal processing. The MZI was fabricated by a lithography technique and we provide, for the first time experimental evaluation of the transmission performance of the MZI using MIM PWGs. The experimental results were in good agreement with the numerical simulations. The proposed structure could be considered as a key device for on-chip optical integrated circuits.

摘要

我们提出并设计了一种基于金属/绝缘体/金属(MIM)等离子体波导的紧凑型非平衡马赫-曾德尔干涉仪(MZI),用于超快光信号处理。该MZI采用光刻技术制造,并且我们首次提供了使用MIM等离子体波导对MZI传输性能的实验评估。实验结果与数值模拟结果吻合良好。所提出的结构可被视为片上光集成电路的关键器件。

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