Mao Shuai, Hu Peng-Cheng, Ding Xue-Mei, Tan Jiu-Bin
Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China.
Rev Sci Instrum. 2016 Aug;87(8):083108. doi: 10.1063/1.4960661.
A fiber-coupled displacement measuring interferometer capable of determining of the posture of a reflective surface of a measuring mirror is proposed. The newly constructed instrument combines fiber-coupled displacement and angular measurement technologies. The proposed interferometer has advantages of both the fiber-coupled and the spatially beam-separated interferometer. A portable dual-position sensitive detector (PSD)-based unit within this proposed interferometer measures the parallelism of the two source beams to guide the fiber-coupling adjustment. The portable dual PSD-based unit measures not only the pitch and yaw of the retro-reflector but also measures the posture of the reflective surface. The experimental results of displacement calibration show that the deviations between the proposed interferometer and a reference one, Agilent 5530, at two different common beam directions are both less than ±35 nm, thus verifying the effectiveness of the beam parallelism measurement. The experimental results of angular calibration show that deviations of pitch and yaw with the auto-collimator (as a reference) are less than ±2 arc sec, thus proving the proposed interferometer's effectiveness for determination of the posture of a reflective surface.
提出了一种能够确定测量镜反射面姿态的光纤耦合位移测量干涉仪。新构建的仪器结合了光纤耦合位移和角度测量技术。所提出的干涉仪兼具光纤耦合干涉仪和空间光束分离干涉仪的优点。该干涉仪中基于便携式双位置敏感探测器（PSD）的单元测量两束源光束的平行度，以指导光纤耦合调整。基于便携式双PSD的单元不仅测量后向反射镜的俯仰和偏航，还测量反射面的姿态。位移校准的实验结果表明，在所提出的干涉仪与参考干涉仪（安捷伦5530）在两个不同的公共光束方向上的偏差均小于±35 nm，从而验证了光束平行度测量的有效性。角度校准的实验结果表明，与自准直仪（作为参考）相比，俯仰和偏航的偏差小于±2角秒，从而证明了所提出的干涉仪在确定反射面姿态方面的有效性。
