Zhang Enzheng, Chen Benyong, Zheng Hao, Yan Liping, Teng Xueying
Opt Express. 2018 Jan 8;26(1):90-98. doi: 10.1364/OE.26.000090.
A laser heterodyne interferometer with rotational error compensation is proposed for precision displacement measurement. In this interferometer, the rotational error of the measured object is obtained by using an angle detecting unit which is composed of a semi-reflective film, a polarizing beam splitter, a quarter-wave plate, a convex lens and a two-dimensional position sensitive detector. And the obtained rotational angle is used for compensating its influence on displacement measurement result. The optical configuration of the proposed interferometer is designed, and the mathematical model for displacement measurement with rotational error compensation is established. The coupling effect of axial displacement on rotational angle measurement and the rotational angle range used for compensation on displacement measurement are discussed in detail. To verify feasibility of the proposed interferometer, the experimental setup was constructed and several verification experiments were performed.
提出了一种具有旋转误差补偿功能的激光外差干涉仪用于精密位移测量。在该干涉仪中，通过使用由半反射膜、偏振分束器、四分之一波片、凸透镜和二维位置敏感探测器组成的角度检测单元来获取被测物体的旋转误差。然后将获得的旋转角度用于补偿其对位移测量结果的影响。设计了所提出干涉仪的光学结构，并建立了具有旋转误差补偿的位移测量数学模型。详细讨论了轴向位移对旋转角度测量的耦合效应以及用于位移测量补偿的旋转角度范围。为验证所提出干涉仪的可行性，搭建了实验装置并进行了若干验证实验。
