用于高温应用的全碳化硅光纤压力传感器的制造

Fabrication of All-SiC Fiber-Optic Pressure Sensors for High-Temperature Applications.

作者信息

Jiang Yonggang, Li Jian, Zhou Zhiwen, Jiang Xinggang, Zhang Deyuan

机构信息

School of Mechanical Engineering and Automation, Beihang University, Beijing 100191, China.

International Research Institute for Multidisciplinary Science, Beihang University, Beijing 100191, China.

出版信息

Sensors (Basel). 2016 Oct 17;16(10):1660. doi: 10.3390/s16101660.

DOI:10.3390/s16101660

PMID:27763494

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5087448/

Abstract

Single-crystal silicon carbide (SiC)-based pressure sensors can be used in harsh environments, as they exhibit stable mechanical and electrical properties at elevated temperatures. A fiber-optic pressure sensor with an all-SiC sensor head was fabricated and is herein proposed. SiC sensor diaphragms were fabricated via an ultrasonic vibration mill-grinding (UVMG) method, which resulted in a small grinding force and low surface roughness. The sensor head was formed by hermetically bonding two layers of SiC using a nickel diffusion bonding method. The pressure sensor illustrated a good linearity in the range of 0.1-0.9 MPa, with a resolution of 0.27% F.S. (full scale) at room temperature.

摘要

基于单晶碳化硅（SiC）的压力传感器可用于恶劣环境，因为它们在高温下表现出稳定的机械和电气性能。本文制备并提出了一种具有全SiC传感头的光纤压力传感器。SiC传感膜片通过超声振动磨粒磨削（UVMG）方法制备，该方法磨削力小且表面粗糙度低。传感头通过镍扩散键合方法将两层SiC气密键合而成。该压力传感器在0.1 - 0.9 MPa范围内呈现良好的线性度，在室温下分辨率为0.27% F.S.（满量程）。