Fu Sze Ming, Zhong Yan Kai, Tu Ming Hsiang, Chen Bo Ruei, Lin Albert
Department of Electronics Engineering, National Chiao-Tung University, 1001 University Road, Hsinchu, Taiwan.
Sci Rep. 2016 Oct 26;6:36244. doi: 10.1038/srep36244.
Broadband perfect metamaterial absorbers have been drawing significant attention in recent years. A close-to-unity absorption over a broad spectral range is established and this facilitates many photonic applications. A more challenging goal is to construct a broadband absorber with a tailored spectral absorption. The spectral absorption control and spectral shaping are very critical in many applications, such as thermal-photovoltaic, thermal emitters, spectrum imaging system, biomedical and extraterrestrial sensing, and refractive index sensor. In this work, one-dimensional (1D) planar stacking structure is designed to achieve the ultimate goal of a functionalized absorber with a fully tailorable spectral absorption. The lithography and etching process are totally eliminated in this proposed structure, and the fabrication is fully compatible with the regular silicon IC processing. By using ~2 nm ultra-thin metallic layers with a 10-pair (10X) SiO/SiN integrated dielectric filter, we can achieve decent spectral response shaping. The planar configuration of the ultra-thin-metal metamaterial perfect absorber (MPA) is the key to the easy design/integration of the dielectric filters on top of the MPA. Specifically, band-rejected, high-pass, low-pass and band-pass structure are constructed successfully. Finally, experimental evidence to support our simulation result is also provided, which proves the feasibility of our proposal.
近年来,宽带完美超材料吸收体一直备受关注。已实现了在宽光谱范围内接近单位吸收率,这推动了许多光子应用。一个更具挑战性的目标是构建具有定制光谱吸收的宽带吸收体。光谱吸收控制和光谱整形在许多应用中非常关键,如热光伏、热发射体、光谱成像系统、生物医学和外星传感以及折射率传感器。在这项工作中,设计了一维(1D)平面堆叠结构,以实现具有完全可定制光谱吸收的功能化吸收体这一最终目标。在此提出的结构中完全消除了光刻和蚀刻工艺,并且制造与常规硅集成电路工艺完全兼容。通过使用具有10对(10X)SiO/SiN集成介质滤波器的约2纳米超薄金属层,我们可以实现良好的光谱响应整形。超薄金属超材料完美吸收体(MPA)的平面配置是在MPA顶部轻松设计/集成介质滤波器的关键。具体而言,成功构建了带阻、高通、低通和带通结构。最后,还提供了支持我们模拟结果的实验证据,证明了我们提议的可行性。