Development of one-shot aspheric measurement system with a Shack-Hartmann sensor.

We present a measurement system for a rotationally symmetric aspheric surface that is designed for accurate and high-volume measurements. The system uses the Shack-Hartmann sensor and is capable of measuring aspheres with a maximum diameter of 90 mm in one shot. In our system, a reference surface, made with the same aspheric parameter as the test surface, is prepared. The test surface is recovered as the deviation from the reference surface using a figure-error reconstruction algorithm with a ray coordinate and angle variant table. In addition, we developed a method to calibrate the rotationally symmetric system error. These techniques produce stable measurements and high accuracy. For high-throughput measurements, a single measurement scheme and auto alignment are implemented; they produce a 4.5 min measurement time, including calibration and alignment. In this paper, we introduce the principle and calibration method of our system. We also demonstrate that our system achieved an accuracy better than 5.8 nm RMS and a repeatability of 0.75 nm RMS by comparing our system's aspheric measurement results with those of a probe measurement machine.