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作为基于电容式传感器的索引计量平台的有源原子力显微镜验证技术的虚拟距离方法

Virtual Distances Methodology as Verification Technique for AACMMs with a Capacitive Sensor Based Indexed Metrology Platform.

作者信息

Acero Raquel, Santolaria Jorge, Brau Agustin, Pueo Marcos

机构信息

Centro Universitario de la Defensa, Academia General Militar, Ctra. Huesca s/n, Zaragoza 50090, Spain.

Department of Design and Manufacturing Engineering, University of Zaragoza, María de Luna 3, Zaragoza 50018, Spain.

出版信息

Sensors (Basel). 2016 Nov 18;16(11):1940. doi: 10.3390/s16111940.

DOI:10.3390/s16111940
PMID:27869722
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5134599/
Abstract

This paper presents a new verification procedure for articulated arm coordinate measuring machines (AACMMs) together with a capacitive sensor-based indexed metrology platform (IMP) based on the generation of virtual reference distances. The novelty of this procedure lays on the possibility of creating virtual points, virtual gauges and virtual distances through the indexed metrology platform's mathematical model taking as a reference the measurements of a ball bar gauge located in a fixed position of the instrument's working volume. The measurements are carried out with the AACMM assembled on the IMP from the six rotating positions of the platform. In this way, an unlimited number and types of reference distances could be created without the need of using a physical gauge, therefore optimizing the testing time, the number of gauge positions and the space needed in the calibration and verification procedures. Four evaluation methods are presented to assess the volumetric performance of the AACMM. The results obtained proved the suitability of the virtual distances methodology as an alternative procedure for verification of AACMMs using the indexed metrology platform.

摘要

本文提出了一种用于关节臂坐标测量机(AACMM)的新验证程序,以及一种基于虚拟参考距离生成的基于电容式传感器的索引计量平台(IMP)。该程序的新颖之处在于,通过索引计量平台的数学模型,以位于仪器工作空间固定位置的球杆仪的测量值为参考,可以创建虚拟点、虚拟量规和虚拟距离。测量是在AACMM安装在IMP上从平台的六个旋转位置进行的。通过这种方式,可以创建无限数量和类型的参考距离,而无需使用物理量规,从而优化测试时间、量规位置数量以及校准和验证程序所需的空间。提出了四种评估方法来评估AACMM的体积性能。所获得的结果证明了虚拟距离方法作为使用索引计量平台验证AACMM的替代程序的适用性。

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本文引用的文献

1
Articulated arm coordinate measuring machine calibration by laser tracker multilateration.基于激光跟踪仪多边测量法的关节臂坐标测量机校准
ScientificWorldJournal. 2014 Jan 29;2014:681853. doi: 10.1155/2014/681853. eCollection 2014.
2
Design and mechanical evaluation of a capacitive sensor-based indexed platform for verification of portable coordinate measuring instruments.基于电容式传感器的索引平台用于便携式坐标测量仪器验证的设计与力学评估
Sensors (Basel). 2014 Jan 2;14(1):606-33. doi: 10.3390/s140100606.