Rose H H
Darmstadt University of Technology, Germany.
Sci Technol Adv Mater. 2016 Jan 12;9(1):014107. doi: 10.1088/1468-6996/9/1/014107. eCollection 2008 Jan.
During recent years, the theory of charged particle optics together with advances in fabrication tolerances and experimental techniques has lead to very significant advances in high-performance electron microscopes. Here, we will describe which theoretical tools, inventions and designs have driven this development. We cover the basic theory of higher-order electron optics and of image formation in electron microscopes. This leads to a description of different methods to correct aberrations by multipole fields and to a discussion of the most advanced design that take advantage of these techniques. The theory of electron mirrors is developed and it is shown how this can be used to correct aberrations and to design energy filters. Finally, different types of energy filters are described.
近年来，带电粒子光学理论以及制造公差和实验技术的进步推动了高性能电子显微镜取得了非常显著的进展。在此，我们将描述是哪些理论工具、发明和设计推动了这一发展。我们涵盖了高阶电子光学和电子显微镜中图像形成的基本理论。这进而引出了用多极场校正像差的不同方法的描述，以及对利用这些技术的最先进设计的讨论。电子镜理论得到了发展，并展示了如何利用它来校正像差和设计能量过滤器。最后，描述了不同类型的能量过滤器。
