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关于难熔碳化物、氮化物和硼化物作为电子显微镜热电子发射体的研究。

Studies of refractory carbides, nitrides, and borides as the thermionic emitters for electron microscopy.

作者信息

Yada K, Masaoka H, Shoji Y, Tanji T

机构信息

Research Institute for Scientific Measurements, Tohoku University, Katahira Sendai, Japan.

出版信息

J Electron Microsc Tech. 1989 Jul;12(3):252-61. doi: 10.1002/jemt.1060120308.

Abstract

Thermionic emission properties of several kinds of refractory carbides, nitrides, and borides of the transition metals in the form of powder were investigated with a newly developed measuring device and evaluated by the figure of merit defined as the ratio of the effective work function to the working temperature at which the vapor pressure becomes 1 x 10(-5) Torr. There are several materials whose thermionic emission properties are better than those of tungsten or compatible to those of tungsten among the carbides and borides, such as TaC, HfC, ZrC, LaB6, and CeB6, as judged by the figure of merit. New preparation methods for carburization, nitriding, and boriding of the wires of matrix metals and alloys were successfully developed for using these materials as the cathode of the electron microscope. Other necessary techniques such as spot welding and electrolytic etching were also developed. From the brightness characteristics, it was found that some of carbides, carbide solid solutions, and borides such as HfC, ZrC (Ta0.8-0.7Hf0.2-0.3)C, TaB2, and HfB2 are very good emitters comparable to LaB6. It is emphasized that the work functions of the carbide-solid solutions (Ta0.8Hf0.2)C and (Ta0.7Hf0.3)C, which have low rates of evaporation at high temperature, show no remarkable rise as compared with that of HfC, so that their figures of merit are better than that of HfC. Feasibility of providing good cathodes with HfC and (Ta0.8Hf0.2)C tips was demonstrated by taking high-resolution electron micrographs.

摘要

利用新开发的测量装置对几种过渡金属的难熔碳化物、氮化物和硼化物粉末的热电子发射特性进行了研究,并通过将有效功函数与蒸气压变为1×10⁻⁵托时的工作温度之比定义的品质因数进行了评估。根据品质因数判断,在碳化物和硼化物中,有几种材料的热电子发射特性优于钨或与钨相当,如TaC、HfC、ZrC、LaB₆和CeB₆。成功开发了基体金属和合金丝的渗碳、渗氮和硼化的新制备方法,以便将这些材料用作电子显微镜的阴极。还开发了点焊和电解蚀刻等其他必要技术。从亮度特性发现,一些碳化物、碳化物固溶体和硼化物,如HfC、ZrC(Ta₀.₈ - ₀.₇Hf₀.₂ - ₀.₃)C、TaB₂和HfB₂是与LaB₆相当的非常好的发射体。需要强调的是,在高温下蒸发率较低的碳化物固溶体(Ta₀.₈Hf₀.₂)C和(Ta₀.₇Hf₀.₃)C的功函数与HfC相比没有显著升高,因此它们的品质因数优于HfC。通过拍摄高分辨率电子显微照片证明了用HfC和(Ta₀.₈Hf₀.₂)C尖端提供良好阴极的可行性。

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