Farghaly Mahmoud A, Akram Muhammad Nadeem, Halvorsen Einar
Opt Express. 2016 Dec 12;24(25):28889-28904. doi: 10.1364/OE.24.028889.
WWe report a modeling framework for evaluating the performance of piezoelectrically actuated MEMS tunable lenses. It models the static opto-electromechanical coupling for symmetric configurations of piezoelectric actuators based on the laminated-plate theory, linear piezoelectricity, and ray tracing. With these assumptions, it helps to find geometrical parameters for actuators on clamped square or circular diaphragms that give a diffraction-limited tunable lens with minimum F-number. The tunable lens' optical performance and its focusing capability, alone and in combination with a paraxial fixed lens, were calculated in terms of object distance and actuation voltage. Using the modeling framework, we confirmed that the modulation transfer function for objects located at different distances remains the same after voltage adjustment.
我们报告了一种用于评估压电驱动微机电系统（MEMS）可调谐透镜性能的建模框架。该框架基于层合板理论、线性压电性和光线追踪，对压电致动器对称配置的静态光机电耦合进行建模。基于这些假设，有助于找到用于夹持方形或圆形膜片上致动器的几何参数，从而得到具有最小F数的衍射极限可调谐透镜。根据物距和驱动电压，计算了可调谐透镜单独以及与近轴固定透镜组合时的光学性能及其聚焦能力。使用该建模框架，我们证实了在电压调整后，位于不同距离处物体的调制传递函数保持不变。
