一种探测低温下涂层机械损耗的新方法。

A new method of probing mechanical losses of coatings at cryogenic temperatures.

作者信息

Galliou Serge, Deléglise Samuel, Goryachev Maxim, Neuhaus Leonhard, Cagnoli Gianpietro, Zerkani Salim, Dolique Vincent, Bon Jérémy, Vacheret Xavier, Abbé Philippe, Pinard Laurent, Michel Christophe, Karassouloff Thibaut, Briant Tristan, Cohadon Pierre-François, Heidmann Antoine, Tobar Michael E, Bourquin Roger

机构信息

FEMTO-ST Institute, Univ. Bourgogne Franche-Conté, CNRS, ENSMM 25000 Besançon, France.

Laboratoire Kastler Brossel, UPMC-Sorbonne Universités, CNRS, ENS-PSL Research University, Collège de France, 75005 Paris, France.

出版信息

Rev Sci Instrum. 2016 Dec;87(12):123906. doi: 10.1063/1.4972106.

DOI:10.1063/1.4972106

PMID:28040968

Abstract

A new method of probing mechanical losses and comparing the corresponding deposition processes of metallic and dielectric coatings in 1-100 MHz frequency range and cryogenic temperatures is presented. The method is based on the use of high-quality quartz acoustic cavities whose internal losses are orders of magnitude lower than any available coating nowadays. The approach is demonstrated for chromium, chromium/gold, and multilayer tantala/silica coatings. The TaO/SiO coating has been found to exhibit a loss angle lower than 1.6 × 10 near 30 MHz at 4 K. The results are compared to the previous measurements.

摘要

提出了一种在1 - 100 MHz频率范围和低温下探测机械损耗并比较金属和介电涂层相应沉积过程的新方法。该方法基于使用高质量石英声学腔，其内部损耗比目前任何可用涂层低几个数量级。该方法已在铬、铬/金和多层钽氧化物/二氧化硅涂层上得到验证。已发现TaO/SiO涂层在4 K时接近30 MHz处的损耗角低于1.6×10。将结果与先前的测量结果进行了比较。