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利用原子力显微镜在磷酸盐玻璃上电化学直接书写和擦除银纳米结构。

Electrochemical direct writing and erasing of silver nanostructures on phosphate glass using atomic force microscopy.

机构信息

Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA.

出版信息

Nanotechnology. 2017 Feb 10;28(6):065301. doi: 10.1088/1361-6528/aa5219. Epub 2017 Jan 3.

DOI:10.1088/1361-6528/aa5219
PMID:28045006
Abstract

This paper reports a liquid-free, mask-less electrochemical direct-write lithographic technique using an atomic force microscopy (AFM) probe for writing silver nanostructures in minutes on an optically transparent substrate. Under ambient conditions, silver is locally and controllably extracted to the surface of superionic (AgI) (AgPO) glass by bringing a conductive AFM probe tip in contact with it, biasing the probe with a negative voltage, and regulating the resulting current. The growth mechanism of the resulting nanostructure is explored by extracting silver with a stationary AFM tip on the surface of the silver. A moving tip was then used to produce continuous lines, solid films and discrete dots of silver by implementing continuous and pulsed current writing approaches. The line dimensions depend on writing speed and current flowing in the electrochemical circuit, while the size and spacing of the dots depend on the parameters (magnitude, duration and frequency) of the current pulses and the writing speed of the AFM tip. Line-widths in the ∼100 nm range are demonstrated. Our investigation also shows that a threshold potential must be overcome to be able to draw and reduce silver ions on the glass surface. When polarity between the electrodes is reversed, the patterned silver ionizes back into the glass, thus offering the capability to erase and rewrite Ag patterns on the glass surface.

摘要

本文报道了一种无需液体、无需掩模的电化学直接书写光刻技术,使用原子力显微镜 (AFM) 探针在光学透明基底上快速书写银纳米结构。在环境条件下,通过将导电 AFM 探针尖端与超离子 (AgI) (AgPO) 玻璃接触,对探针施加负电压,并调节产生的电流,可将银局部且可控地提取到玻璃表面。通过用固定的 AFM 探针尖端在银表面提取银,探索了所得纳米结构的生长机制。然后,通过实施连续电流和脉冲电流写入方法,使用移动尖端来产生连续线条、固体薄膜和离散的银点。线条尺寸取决于写入速度和电化学电路中的电流,而点的大小和间距取决于电流脉冲的参数(幅度、持续时间和频率)和 AFM 尖端的写入速度。演示了在 ∼100nm 范围内的线宽。我们的研究还表明,必须克服阈值电势才能在玻璃表面上绘制和还原银离子。当电极之间的极性反转时,图案化的银会重新离子化到玻璃中,从而提供在玻璃表面擦除和重写 Ag 图案的能力。

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