• 文献检索
  • 文档翻译
  • 深度研究
  • 学术资讯
  • Suppr Zotero 插件Zotero 插件
  • 邀请有礼
  • 套餐&价格
  • 历史记录
应用&插件
Suppr Zotero 插件Zotero 插件浏览器插件Mac 客户端Windows 客户端微信小程序
定价
高级版会员购买积分包购买API积分包
服务
文献检索文档翻译深度研究API 文档MCP 服务
关于我们
关于 Suppr公司介绍联系我们用户协议隐私条款
关注我们

Suppr 超能文献

核心技术专利：CN118964589B侵权必究
粤ICP备2023148730 号-1Suppr @ 2026

文献检索

告别复杂PubMed语法，用中文像聊天一样搜索，搜遍4000万医学文献。AI智能推荐，让科研检索更轻松。

立即免费搜索

文件翻译

保留排版，准确专业，支持PDF/Word/PPT等文件格式，支持 12+语言互译。

免费翻译文档

深度研究

AI帮你快速写综述，25分钟生成高质量综述，智能提取关键信息，辅助科研写作。

立即免费体验

一种基于LIGA技术的兼具离子源和空气泵双重功能的集成微加工芯片。

An Integrated Microfabricated Chip with Double Functions as an Ion Source and Air Pump Based on LIGA Technology.

作者信息

Li Hua, Jiang Linxiu, Guo Chaoqun, Zhu Jianmin, Jiang Yongrong, Chen Zhencheng

机构信息

School of Life and Environmental Sciences, Guilin University of Electronic Technology, Guilin 541004, China.

Guangxi Experiment Center of Information Science, Guilin 541004, China.

出版信息

Sensors (Basel). 2017 Jan 4;17(1):87. doi: 10.3390/s17010087.

DOI:10.3390/s17010087
PMID:28054980
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5298660/
Abstract

The injection and ionization of volatile organic compounds (VOA) by an integrated chip is experimentally analyzed in this paper. The integrated chip consists of a needle-to-cylinder electrode mounting on the Polymethyl Methacrylate (PMMA) substrate. The needle-to-cylinder electrode is designed and fabricated by Lithographie, Galvanoformung and Abformung (LIGA) technology. In this paper, the needle is connected to a negative power supply of -5 kV and used as the cathode; the cylinder electrodes are composed of two arrays of cylinders and serve as the anode. The ionic wind is produced based on corona and glow discharges of needle-to-cylinder electrodes. The experimental setup is designed to observe the properties of the needle-to-cylinder discharge and prove its functions as an ion source and air pump. In summary, the main results are as follows: (1) the ionic wind velocity produced by the chip is about 0.79 m/s at an applied voltage of -3300 V; (2) acetic acid and ammonia water can be injected through the chip, which is proved by pH test paper; and (3) the current measured by a Faraday cup is about 10 pA for acetic acid and ammonia with an applied voltage of -3185 V. The integrated chip is promising for portable analytical instruments, such as ion mobility spectrometry (IMS), field asymmetric ion mobility spectrometry (FAIMS), and mass spectrometry (MS).

摘要

本文对一种集成芯片对挥发性有机化合物（VOA）的注射和电离进行了实验分析。该集成芯片由安装在聚甲基丙烯酸甲酯（PMMA）基板上的针筒电极组成。针筒电极采用光刻、电铸和注塑（LIGA）技术设计制造。在本文中，针连接到 -5 kV 的负电源并用作阴极；圆柱电极由两排圆柱组成并用作阳极。离子风基于针筒电极的电晕放电和辉光放电产生。实验装置旨在观察针筒放电的特性，并证明其作为离子源和空气泵的功能。综上所述，主要结果如下：（1）在 -3300 V 的施加电压下，芯片产生的离子风速约为 0.79 m/s；（2）通过 pH 试纸证明，乙酸和氨水可以通过芯片注入；（3）在 -3185 V 的施加电压下，用法拉第杯测量的乙酸和氨的电流约为 10 pA。该集成芯片在便携式分析仪器方面具有应用前景，如离子迁移谱（IMS）、场不对称离子迁移谱（FAIMS）和质谱（MS）。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfc7/5298660/0a705d844495/sensors-17-00087-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfc7/5298660/97cb40f37a54/sensors-17-00087-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfc7/5298660/af458ec9ae8b/sensors-17-00087-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfc7/5298660/057f1bfb2488/sensors-17-00087-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfc7/5298660/0c69e1661829/sensors-17-00087-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfc7/5298660/c47fbe0944fa/sensors-17-00087-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfc7/5298660/9b4837cf9bd2/sensors-17-00087-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfc7/5298660/e0d276bedc8a/sensors-17-00087-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfc7/5298660/b255a6649bb7/sensors-17-00087-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfc7/5298660/04d60636778b/sensors-17-00087-g009a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfc7/5298660/1e339288019f/sensors-17-00087-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfc7/5298660/1850aba293a1/sensors-17-00087-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfc7/5298660/0a705d844495/sensors-17-00087-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfc7/5298660/97cb40f37a54/sensors-17-00087-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfc7/5298660/af458ec9ae8b/sensors-17-00087-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfc7/5298660/057f1bfb2488/sensors-17-00087-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfc7/5298660/0c69e1661829/sensors-17-00087-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfc7/5298660/c47fbe0944fa/sensors-17-00087-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfc7/5298660/9b4837cf9bd2/sensors-17-00087-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfc7/5298660/e0d276bedc8a/sensors-17-00087-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfc7/5298660/b255a6649bb7/sensors-17-00087-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfc7/5298660/04d60636778b/sensors-17-00087-g009a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfc7/5298660/1e339288019f/sensors-17-00087-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfc7/5298660/1850aba293a1/sensors-17-00087-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfc7/5298660/0a705d844495/sensors-17-00087-g012.jpg

相似文献

1
An Integrated Microfabricated Chip with Double Functions as an Ion Source and Air Pump Based on LIGA Technology.一种基于LIGA技术的兼具离子源和空气泵双重功能的集成微加工芯片。
Sensors (Basel). 2017 Jan 4;17(1):87. doi: 10.3390/s17010087.
2
Design, Fabrication and Mass-spectrometric Studies of a Micro Ion Source for High-Field Asymmetric Waveform Ion Mobility Spectrometry.用于高场不对称波形离子迁移谱的微离子源的设计、制造与质谱研究
Micromachines (Basel). 2019 Apr 27;10(5):286. doi: 10.3390/mi10050286.
3
[Design and experiment of a needle-to-cylinder electrode structure realizing the negative DC glow discharge in ambient air].[一种实现大气环境中负直流辉光放电的针-筒电极结构的设计与实验]
Guang Pu Xue Yu Guang Pu Fen Xi. 2014 Jul;34(7):1797-800.
4
A needle-to-post air discharge ion source in tandem with FAIMS system.串联式针到柱空气放电离子源与 FAIMS 系统。
PLoS One. 2019 Aug 16;14(8):e0221080. doi: 10.1371/journal.pone.0221080. eCollection 2019.
5
[Spectroscopic characteristics of DC excited atmospheric pressure glow discharges generated in a needle-plate electrode device and a needle-water electrode one].[针-板电极装置和针-水电极装置中产生的直流激发大气压辉光放电的光谱特性]
Guang Pu Xue Yu Guang Pu Fen Xi. 2014 Jan;34(1):16-9.
6
High Asymmetric Longitudinal Field Ion Mobility Spectrometry Device for Low Power Mobile Chemical Separation and Detection.高纵横比纵向场离子迁移谱仪，用于低功耗移动化学分离和检测。
Anal Chem. 2019 May 7;91(9):5523-5529. doi: 10.1021/acs.analchem.8b05577. Epub 2019 Apr 11.
7
Time-lag properties of corona streamer discharges between impulse sphere and dc needle electrodes under atmospheric air conditions.大气条件下脉冲球体与直流针电极之间电晕流光放电的时滞特性。
Rev Sci Instrum. 2013 Feb;84(2):024702. doi: 10.1063/1.4791587.
8
A flowing atmospheric pressure afterglow as an ion source coupled to a differential mobility analyzer for volatile organic compound detection.一种作为离子源与差分迁移率分析仪耦合的流动大气压后效，用于挥发性有机化合物检测。
Analyst. 2016 May 23;141(11):3437-43. doi: 10.1039/c5an01938a.
9
Atmospheric pressure air direct current glow discharge ionization source for ion mobility spectrometry.用于离子迁移谱的大气压空气直流辉光放电电离源。
Anal Chem. 2008 May 15;80(10):3925-30. doi: 10.1021/ac800197g. Epub 2008 Apr 17.
10
Discrimination of bacteria by rapid sensing their metabolic volatiles using an aspiration-type ion mobility spectrometer (a-IMS) and gas chromatography-mass spectrometry GC-MS.利用吸气式离子迁移谱仪（a-IMS）和气相色谱-质谱联用技术（GC-MS）快速感应细菌代谢挥发物，实现细菌的鉴别。
Anal Chim Acta. 2017 Aug 22;982:209-217. doi: 10.1016/j.aca.2017.06.031. Epub 2017 Jun 22.

引用本文的文献

1
A needle-to-post air discharge ion source in tandem with FAIMS system.串联式针到柱空气放电离子源与 FAIMS 系统。
PLoS One. 2019 Aug 16;14(8):e0221080. doi: 10.1371/journal.pone.0221080. eCollection 2019.
2
Design, Fabrication and Mass-spectrometric Studies of a Micro Ion Source for High-Field Asymmetric Waveform Ion Mobility Spectrometry.用于高场不对称波形离子迁移谱的微离子源的设计、制造与质谱研究
Micromachines (Basel). 2019 Apr 27;10(5):286. doi: 10.3390/mi10050286.

本文引用的文献

1
Miniature and Fieldable Mass Spectrometers: Recent Advances.微型可现场使用质谱仪：最新进展
Anal Chem. 2016 Jan 5;88(1):2-29. doi: 10.1021/acs.analchem.5b03070. Epub 2015 Oct 21.
2
Application of super-resolution reconstruction of sparse representation in mass spectrometry imaging.稀疏表示超分辨率重建在质谱成像中的应用。
Rapid Commun Mass Spectrom. 2015 Jun 30;29(12):1178-84. doi: 10.1002/rcm.7205.
3
Development of dielectric-barrier-discharge ionization.介质阻挡放电电离的发展
Anal Bioanal Chem. 2015 Mar;407(9):2345-64. doi: 10.1007/s00216-014-8281-y. Epub 2014 Nov 25.
4
[Design and experiment of a needle-to-cylinder electrode structure realizing the negative DC glow discharge in ambient air].[一种实现大气环境中负直流辉光放电的针-筒电极结构的设计与实验]
Guang Pu Xue Yu Guang Pu Fen Xi. 2014 Jul;34(7):1797-800.
5
Microfabricated glow discharge plasma (MFGDP) for ambient desorption/ionization mass spectrometry.微纳加工辉光放电等离子体（MFGDP）用于环境解吸/电离质谱分析。
Anal Chem. 2013 Oct 1;85(19):9013-20. doi: 10.1021/ac401359k. Epub 2013 Sep 19.
6
Microwave-induced plasma desorption/ionization source for ambient mass spectrometry.微波诱导等离子体解吸/电离源用于环境质谱分析。
Anal Chem. 2013 May 7;85(9):4512-9. doi: 10.1021/ac400296v. Epub 2013 Apr 15.
7
Real-time particle mass spectrometry based on resonant micro strings.基于谐振微弦的实时颗粒质谱分析。
Sensors (Basel). 2010;10(9):8092-100. doi: 10.3390/s100908092. Epub 2010 Aug 27.
8
Desorption corona beam ionization source for mass spectrometry.解吸电晕束电离源质谱法。
Analyst. 2010 Apr;135(4):688-95. doi: 10.1039/b922616h.
9
Rapid screening of active ingredients in drugs by mass spectrometry with low-temperature plasma probe.使用低温等离子体探针通过质谱法快速筛选药物中的活性成分。
Anal Bioanal Chem. 2009 Oct;395(3):591-9. doi: 10.1007/s00216-009-2947-x. Epub 2009 Jul 30.
10
Analysis of the inhibition of the ergosterol pathway in fungi using the atmospheric solids analysis probe (ASAP) method.使用常压固体分析探头（ASAP）方法分析真菌中麦角固醇途径的抑制作用。
J Am Soc Mass Spectrom. 2007 Jul;18(7):1274-8. doi: 10.1016/j.jasms.2007.03.032. Epub 2007 Apr 6.