Wang Min, Xu Yingxin, Fang Zhiwei, Liao Yang, Wang Peng, Chu Wei, Qiao Lingling, Lin Jintian, Fang Wei, Cheng Ya
Opt Express. 2017 Jan 9;25(1):124-129. doi: 10.1364/OE.25.000124.
We demonstrate electro-optic tuning of an on-chip lithium niobate microresonator with integrated in-plane microelectrodes. First, the metallic microelectrodes were fabricated on the substrate using a femtosecond laser. Then high-Q lithium niobate microresonator located between the microelectrodes was further fabricated by femtosecond laser direct writing accompanied by focused ion beam milling. Thanks to the efficient design, a high electro-optical tuning coefficient of 3.41 pm/V has been obtained.
我们展示了一种具有集成平面微电极的片上铌酸锂微谐振器的电光调谐。首先，使用飞秒激光在衬底上制造金属微电极。然后，通过飞秒激光直写并结合聚焦离子束铣削，在微电极之间进一步制造了高Q值铌酸锂微谐振器。由于采用了高效设计，获得了3.41 pm/V的高电光调谐系数。
