Center for Integrated Nanostructure Physics, Institute for Basic Science (IBS) , Suwon 16419, Korea.
ACS Appl Mater Interfaces. 2017 Feb 1;9(4):3246-3250. doi: 10.1021/acsami.6b12258. Epub 2017 Jan 18.
Growth of perovskite oxide thin films on Si in crystalline form has long been a critical obstacle for the integration of multifunctional oxides into Si-based technologies. In this study, we propose pulsed laser deposition of a crystalline SrTiO thin film on a Si using graphene substrate. The SrTiO thin film on graphene has a highly (00l)-oriented crystalline structure which results from the partial epitaxy. Moreover, graphene promotes a sharp interface by highly suppressing the chemical intermixing. The important role of graphene as a 2D substrate and diffusion barrier allows the expansion of device applications based on functional complex oxides.
在 Si 上生长具有晶相的钙钛矿氧化物薄膜一直是将多功能氧化物集成到基于 Si 的技术中的关键障碍。在本研究中,我们提出了使用石墨烯衬底通过脉冲激光沉积在 Si 上沉积结晶 SrTiO 薄膜。由于部分外延,在石墨烯上的 SrTiO 薄膜具有高度(00l)取向的结晶结构。此外,石墨烯通过高度抑制化学混合来促进尖锐的界面。石墨烯作为 2D 衬底和扩散势垒的重要作用允许基于功能复杂氧化物的器件应用的扩展。