Choo Sooho, Varshney Shivasheesh, Liu Huan, Sharma Shivam, James Richard D, Jalan Bharat
Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, MN 55455, USA.
Department of Aerospace Engineering and Mechanics, University of Minnesota, Minneapolis, MN 55455, USA.
Sci Adv. 2024 Dec 13;10(50):eadq8561. doi: 10.1126/sciadv.adq8561. Epub 2024 Dec 11.
Motivated by the growing demand to integrate functional oxides with dissimilar materials, numerous studies have been undertaken to detach a functional oxide film from its original substrate, effectively forming a membrane, which can then be affixed to the desired host material. This review article is centered on the synthesis of functional oxide membranes, encompassing various approaches to their synthesis, exfoliation, and transfer techniques. First, we explore the characteristics of thin-film growth techniques with emphasis on molecular beam epitaxy. We then examine the fundamental principles and pivotal factors underlying three key approaches of creating membranes: (i) chemical lift-off, (ii) the two-dimensional layer-assisted lift-off, and (iii) spalling. We review the methods of exfoliation and transfer for each approach. Last, we provide an outlook into the future of oxide membranes, highlighting their applications and emerging properties.
受将功能氧化物与不同材料集成的需求不断增长的推动，人们开展了大量研究，以将功能氧化物薄膜从其原始衬底上分离出来，有效地形成一种膜，然后可以将其附着到所需的主体材料上。这篇综述文章聚焦于功能氧化物膜的合成，涵盖了其合成、剥离和转移技术的各种方法。首先，我们探讨薄膜生长技术的特点，重点是分子束外延。然后，我们研究创建膜的三种关键方法背后的基本原理和关键因素：（i）化学剥离，（ii）二维层辅助剥离，以及（iii）剥落。我们回顾了每种方法的剥离和转移方法。最后，我们展望了氧化物膜的未来，强调了它们的应用和新出现的特性。
