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激光脉冲原子探针断层扫描分析条件的评估:硬质合金的示例

Evaluation of Analysis Conditions for Laser-Pulsed Atom Probe Tomography: Example of Cemented Tungsten Carbide.

作者信息

Peng Zirong, Choi Pyuck-Pa, Gault Baptiste, Raabe Dierk

机构信息

1Department of Microstructure Physics and Alloy Design,Max-Planck-Institut für Eisenforschung GmbH,Max-Planck-Straße 1,40237 Düsseldorf,Germany.

出版信息

Microsc Microanal. 2017 Apr;23(2):431-442. doi: 10.1017/S1431927616012654. Epub 2017 Jan 17.

DOI:10.1017/S1431927616012654
PMID:28093092
Abstract

Cemented tungsten carbide has been analyzed using laser-pulsed atom probe tomography (APT). The influence of experimental parameters, including laser pulse energy, pulse repetition rate, and specimen base temperature, on the acquired data were evaluated from different aspects, such as mass spectrum, chemical composition, noise-to-signal ratio, and multiple events. Within all the applied analysis conditions, only 1 MHz pulse repetition rate led to a strong detector saturation effect, resulting in a largely biased chemical composition. A comparative study of the laser energy settings showed that an ~12 times higher energy was required for the less focused green laser of the LEAPTM 3000X HR system to achieve a similar evaporation field as the finer spot ultraviolet laser of the LEAPTM 5000 XS system.

摘要

已使用激光脉冲原子探针断层扫描(APT)对硬质合金进行了分析。从质谱、化学成分、信噪比和多事件等不同方面评估了包括激光脉冲能量、脉冲重复率和样品基底温度在内的实验参数对采集数据的影响。在所有应用的分析条件下,只有1 MHz的脉冲重复率会导致强烈的探测器饱和效应,从而导致化学成分出现很大偏差。对激光能量设置的对比研究表明,LEAPTM 3000X HR系统聚焦性较差的绿色激光需要比LEAPTM 5000 XS系统更细光斑的紫外激光高约12倍的能量才能实现相似的蒸发场。

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