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高角度环形暗场扫描透射电子显微镜(HAADF-STEM)对非均匀基质中纳米颗粒分布的表征与模拟

HAADF-STEM characterization and simulation of nanoparticle distributions in an inhomogeneous matrix.

作者信息

Liu Z, Epicier T, Lefkir Y, Vitrant G, Destouches N

机构信息

Univ Lyon, UJM-Saint-Etienne, CNRS, Institut d'Optique Graduate School, Laboratoire Hubert Curien UMR 5516, F-42023, Saint-Etienne, France.

MATEIS, UMR 5510 CNRS, Université de Lyon, INSA-Lyon, Villeurbanne, France.

出版信息

J Microsc. 2017 Apr;266(1):60-68. doi: 10.1111/jmi.12519. Epub 2017 Jan 24.

DOI:10.1111/jmi.12519
PMID:28117900
Abstract

Measuring with a high accuracy the size distribution of small metallic nanoparticles loaded in a mesoporous metal oxide matrix is of particular interest for many studies related to new generations of interesting metamaterials. Transmission electron microscopy (TEM) is a powerful tool to determine the nature and morphology of very small particles, but their reliable and automatic identification in an inhomogeneous environment where the nanoparticle/background contrast locally varies is not straightforward. Here, we present how a quantitative analysis of high-angle annular dark field scanning TEM (HAADF STEM) images, accounting for the chemical sensitivity of the technique, can improve the accuracy of semiautomatic segmentation methods based on morphological processing to calculate size histograms. The paper also provides an estimate of the reliability of this method through the analysis of numerically synthesized images. The latter are based on the simulation of HAADF STEM projections of a volume filled with titania, pores and silver particles, whose morphological features, such as dimensions, shapes and densities are evaluated from experimental measurements of real samples. The results obtained with synthesized images prove the performances of the quantitative analysis to suppress nonsilver nanoparticles from the statistics and allow to infer empirical rules to determine imaging parameters that ensure a good reliability of histograms.

摘要

对于许多与新一代有趣的超材料相关的研究而言,高精度测量负载于介孔金属氧化物基质中的小金属纳米颗粒的尺寸分布尤为重要。透射电子显微镜(TEM)是确定非常小的颗粒的性质和形态的有力工具,但在纳米颗粒/背景对比度局部变化的非均匀环境中,对其进行可靠且自动的识别并非易事。在此,我们展示了如何基于该技术的化学敏感性,对高角度环形暗场扫描透射电子显微镜(HAADF STEM)图像进行定量分析,从而提高基于形态学处理的半自动分割方法在计算尺寸直方图时的准确性。本文还通过对数值合成图像的分析,对该方法的可靠性进行了估计。后者基于对充满二氧化钛、孔隙和银颗粒的体积的HAADF STEM投影的模拟,其形态特征(如尺寸、形状和密度)根据真实样品的实验测量进行评估。合成图像获得的结果证明了定量分析在从统计中抑制非银纳米颗粒方面的性能,并允许推断经验规则以确定确保直方图具有良好可靠性的成像参数。

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