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三维共形石墨烯微结构,用于可弯曲的高灵敏电子皮肤。

Three-dimensional conformal graphene microstructure for flexible and highly sensitive electronic skin.

机构信息

Chongqing Key Laboratory of Multi-scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, People's Republic of China. University of Chinese Academy of Sciences, Beijing, 100049, People's Republic of China.

出版信息

Nanotechnology. 2017 Mar 17;28(11):115501. doi: 10.1088/1361-6528/aa5b56. Epub 2017 Jan 31.

DOI:10.1088/1361-6528/aa5b56
PMID:28140339
Abstract

We demonstrate a highly stretchable electronic skin (E-skin) based on the facile combination of microstructured graphene nanowalls (GNWs) and a polydimethylsiloxane (PDMS) substrate. The microstructure of the GNWs was endowed by conformally growing them on the unpolished silicon wafer without the aid of nanofabrication technology. Then a stamping transfer method was used to replicate the micropattern of the unpolished silicon wafer. Due to the large contact interface between the 3D graphene network and the PDMS, this type of E-skin worked under a stretching ratio of nearly 100%, and showed excellent mechanical strength and high sensitivity, with a change in relative resistance of up to 6500% and a gauge factor of 65.9 at 99.64% strain. Furthermore, the E-skin exhibited an obvious highly sensitive response to joint movement, eye movement and sound vibration, demonstrating broad potential applications in healthcare, body monitoring and wearable devices.

摘要

我们展示了一种基于微结构化石墨烯纳米墙(GNWs)和聚二甲基硅氧烷(PDMS)基底的高拉伸电子皮肤(E-skin)。GNWs 的微观结构是通过在未经抛光的硅片上进行共形生长而赋予的,而无需纳米制造技术的帮助。然后使用冲压转移方法复制未经抛光的硅片的微图案。由于 3D 石墨烯网络与 PDMS 之间的大接触界面,这种类型的 E-skin 在拉伸比接近 100%的情况下工作,表现出优异的机械强度和高灵敏度,相对电阻变化高达 6500%,在 99.64%的应变下的应变系数为 65.9。此外,E-skin 对关节运动、眼球运动和声音振动表现出明显的高灵敏度响应,展示了在医疗保健、身体监测和可穿戴设备中的广泛应用潜力。

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