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砷化镓/砷化镓多量子阱 LED 采用双衬底温度分子束外延技术生长。

GaAsBi/GaAs multi-quantum well LED grown by molecular beam epitaxy using a two-substrate-temperature technique.

机构信息

Graduate School of Science and Engineering, Ehime University, 3 Bunkyo-cho, Matsuyama, Ehime, Japan.

出版信息

Nanotechnology. 2017 Mar 10;28(10):105702. doi: 10.1088/1361-6528/aa596c. Epub 2017 Feb 1.

DOI:10.1088/1361-6528/aa596c
PMID:28145284
Abstract

We report a GaAsBi/GaAs multiple quantum well (MQW) light emitting diode (LED) grown by molecular beam epitaxy using a two-substrate-temperature (TST) technique. In particular, the QWs and the barriers in the intrinsic region were grown at the different temperatures of [Formula: see text] = 350 °C and [Formula: see text] respectively. Investigations of the microstructure using transmission electron microscopy (TEM) reveal homogeneous MQWs free of extended defects. Furthermore, the local determination of the Bi distribution profile across the MQWs region using TEM techniques confirm the uniform Bi distribution, while revealing a slightly chemically graded GaAs-on-GaAsBi interface due to Bi surface segregation. Despite this small broadening, we found that Bi segregation is significantly reduced (up to 18% reduction) compared to previous reports on Bi segregation in GaAsBi/GaAs MQWs. Hence, the TST procedure proves as a very efficient method to reduce Bi segregation and thus increase the quality of the layers and interfaces. These improvements positively reflect in the optical properties. Room temperature photoluminescence and electroluminescence (EL) at 1.23 μm emission wavelength are successfully demonstrated using TST MQWs containing less Bi content than in previous reports. Finally, LED fabricated using the present TST technique show current-voltage (I-V) curves with a forward voltage of 3.3 V at an injection current of 130 mA under 1.0 kA cm current excitation. These results not only demonstrate that TST technique provides optical device quality GaAsBi/GaAs MQWs but highlight the relevance of TST-based growth techniques on the fabrication of future heterostructure devices based on dilute bismides.

摘要

我们报告了一种通过分子束外延生长的砷化镓铋/砷化镓多量子阱(MQW)发光二极管(LED),使用了双基片温度(TST)技术。特别是,本征区中的量子阱和势垒分别在[Formula: see text] = 350°C 和 [Formula: see text] 的不同温度下生长。使用透射电子显微镜(TEM)对微结构的研究表明,MQW 没有扩展缺陷,是均匀的。此外,使用 TEM 技术对 MQW 区域内的 Bi 分布轮廓进行局部测定,证实了 Bi 的均匀分布,同时由于 Bi 表面偏析,揭示了 GaAs-on-GaAsBi 界面的略微化学梯度。尽管存在这种小的展宽,但与之前关于 GaAsBi/GaAs MQW 中 Bi 偏析的报告相比,我们发现 Bi 偏析显著减少(减少了 18%)。因此,TST 工艺被证明是一种非常有效的减少 Bi 偏析的方法,从而提高了层和界面的质量。这些改进在光学性能上得到了很好的体现。室温下在 1.23μm 发射波长处的光致发光和电致发光(EL)成功地使用比之前报告中更少 Bi 含量的 TST MQW 进行了演示。最后,使用本报告中的 TST 技术制造的 LED 在 1.0 kA cm 的电流激发下,在 130 mA 的注入电流下,显示出电流-电压(I-V)曲线,正向电压为 3.3 V。这些结果不仅证明了 TST 技术提供了具有光学器件质量的 GaAsBi/GaAs MQW,而且突出了基于 TST 的生长技术在基于稀铋的未来异质结构器件制造中的重要性。

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