Department of Mechanical and Aerospace Engineering, North Carolina State University, Raleigh, NC 27695, United States of America.
Nanotechnology. 2017 Mar 24;28(12):125302. doi: 10.1088/1361-6528/aa5e3f. Epub 2017 Feb 23.
Light interactions with colloidal particles can generate a variety of complex three-dimensional (3D) intensity patterns, which can be utilized for nanolithography. The study of particle-light interactions can add more types of intensity patterns by manipulating key factors. Here we investigate a novel 3D nanolithography technique using colloidal particles under two-beam coherent illuminations. The fabricated 3D nanostructures are hollow, nested within periodic structures, and possess multiple chamber geometry. The effects of incident angles and particle size on the fabricated nanostructures were examined. The relative phase shift between particle position and interference pattern is identified as another significant parameter influencing the resultant nanostructures. A numerical model has been developed to show the evolution of nanostructure geometry with phase shifts, and experimental studies confirm the simulation results. Through the introduction of single colloidal particles, the fabrication capability of Lloyd's mirror interference can now be extended to fabrication of 3D nanostructure with complex shell geometry. The fabricated hollow nanostructures with grating background could find potential applications in the area of photonics, drug delivery, and nanofluidics.
光与胶体颗粒的相互作用可以产生各种复杂的三维（3D）强度图案，可用于纳米光刻。通过操纵关键因素，颗粒-光相互作用的研究可以添加更多类型的强度图案。在这里，我们研究了一种使用双光束相干照明下胶体颗粒的新型 3D 纳米光刻技术。所制造的 3D 纳米结构为中空，嵌套在周期性结构内，具有多个腔室几何形状。研究了入射角和颗粒尺寸对所制造的纳米结构的影响。颗粒位置和干涉图案之间的相对相移被确定为影响所得纳米结构的另一个重要参数。已经开发了一个数值模型来显示纳米结构几何形状随相移的演变，并且实验研究证实了模拟结果。通过引入单个胶体颗粒，可以将 Lloyd 镜干涉的制造能力扩展到具有复杂壳几何形状的 3D 纳米结构的制造。具有光栅背景的中空纳米结构可以在光子学、药物输送和纳流控领域找到潜在的应用。
