Hartings Jed, Narayan Raj K, Ahn Chong
Annu Int Conf IEEE Eng Med Biol Soc. 2016 Aug;2016:6497-6500. doi: 10.1109/EMBC.2016.7592217.
In this paper, we present a flexible temperature sensor with ultra-small polysilicon thermistors for brain temperature monitoring. In vitro sensitivity, resolution, thermal hysteresis and long term stability tests were performed. Temperature coefficient of resistance (TCR) of -0.0031/ °C and resolution of 0.1 °C were obtained for the sensor. Thermal hysteresis for temperature range of 30~45 °C was less than 0.1 °C. With silicon nitride as the passivation layer, the temperature sensor showed a drift within 0.3 °C for 3 days long term stability test in water. In vivo tests showed a clear correlation between the localized brain temperature and electrocorticography (ECoG) signal during spreading depolarization. The developed flexible temperature sensor with small size polysilicon thermistors can be adopted for high resolution brain temperature mapping as well as multimodal monitoring with limited sensing space.
在本文中，我们展示了一种用于脑温监测的带有超小多晶硅热敏电阻的柔性温度传感器。进行了体外灵敏度、分辨率、热滞和长期稳定性测试。该传感器的电阻温度系数（TCR）为-0.0031/°C，分辨率为0.1°C。在30~45°C温度范围内的热滞小于0.1°C。以氮化硅作为钝化层，该温度传感器在水中进行的3天长期稳定性测试中漂移在0.3°C以内。体内测试表明，在扩散性去极化期间，局部脑温与皮层脑电图（ECoG）信号之间存在明显的相关性。所开发的带有小尺寸多晶硅热敏电阻的柔性温度传感器可用于高分辨率脑温测绘以及在有限传感空间内的多模态监测。
