Laboratory for Micro Systems, Department of Mechanical and Aerospace Engineering, §Department of Materials Science and Engineering, and ⊥Biomedical Integrated Circuits and Sensors Department of Electrical and Computer Engineering, Monash University , Melbourne, Victoria 3800, Australia.
ACS Appl Mater Interfaces. 2017 Apr 5;9(13):11345-11349. doi: 10.1021/acsami.7b01207. Epub 2017 Mar 27.
Ultralight graphene elastomer-based flexible sensors are developed to detect subtle vibrations within a broad frequency range. The same device can be employed as an accelerometer, tested within the experimental bandwidth of 20-300 Hz as well as a microphone, monitoring sound pressures from 300 to 20 000 Hz. The sensing element does not contain any metal parts, making them undetectable by external sources and can provide an acceleration sensitivity of 2.6 mV/g, which is higher than or comparable to those of rigid Si-based piezoresistive microelectromechanical systems (MEMS).
超轻石墨烯弹性体基柔性传感器被开发出来,用于检测宽频率范围内的细微振动。同一个设备可以用作加速度计,在 20-300 Hz 的实验带宽内进行测试,也可以用作麦克风,监测 300-20000 Hz 的声压。传感元件不包含任何金属部件,因此外部源无法检测到它们,并可提供 2.6 mV/g 的加速度灵敏度,高于或可与基于刚性 Si 的压阻微机电系统 (MEMS) 相媲美。