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基于聚乙二醇光光刻的简易银纳米线图案化方法及其在软电子学中的应用。

A Simple Silver Nanowire Patterning Method Based on Poly(Ethylene Glycol) Photolithography and Its Application for Soft Electronics.

机构信息

Department of Plant & Environmental New Resources, Kyung Hee University, 1732 Deogyeong-daero, Giheung-gu, Yongin-si, Gyeonggi-do, 446-701, South Korea.

Institute for Superconducting and Electronic Materials (ISEM), Australian Institute for Innovative Materials (AIIM), University of Wollongong, North Wollongong, NSW 2500, Australia.

出版信息

Sci Rep. 2017 May 23;7(1):2282. doi: 10.1038/s41598-017-02511-8.

Abstract

Hydrogel-based flexible microelectrodes have garnered considerable attention recently for soft bioelectronic applications. We constructed silver nanowire (AgNW) micropatterns on various substrates, via a simple, cost-effective, and eco-friendly method without aggressive etching or lift-off processes. Polyethylene glycol (PEG) photolithography was employed to construct AgNW patterns with various shapes and sizes on the glass substrate. Based on a second hydrogel gelation process, AgNW patterns on glass substrate were directly transferred to the synthetic/natural hydrogel substrates. The resultant AgNW micropatterns on the hydrogel exhibited high conductivity (ca. 8.40 × 10 S cm) with low sheet resistance (7.51 ± 1.11 Ω/sq), excellent bending durability (increases in resistance of only ~3 and ~13% after 40 and 160 bending cycles, respectively), and good stability in wet conditions (an increase in resistance of only ~6% after 4 h). Considering both biocompatibility of hydrogel and high conductivity of AgNWs, we anticipate that the AgNW micropatterned hydrogels described here will be particularly valuable as highly efficient and mechanically stable microelectrodes for the development of next-generation bioelectronic devices, especially for implantable biomedical devices.

摘要

水凝胶基柔性微电极在软生物电子应用中受到了广泛关注。我们通过一种简单、经济高效且环保的方法,在各种基底上构建了银纳米线 (AgNW) 微图案,无需使用腐蚀性的刻蚀或剥离工艺。我们采用聚乙二醇 (PEG) 光刻技术在玻璃基底上构建了具有各种形状和尺寸的 AgNW 图案。基于二次水凝胶凝胶化过程,AgNW 图案可以从玻璃基底直接转移到合成/天然水凝胶基底上。在水凝胶上形成的 AgNW 微图案表现出高导电性(约 8.40×10-6 S cm-1)和低面电阻(7.51±1.11 Ω/sq),优异的弯曲耐久性(分别在 40 和 160 次弯曲循环后,电阻增加仅约 3%和 13%),以及在湿条件下的良好稳定性(在 4 小时后,电阻增加仅约 6%)。考虑到水凝胶的生物相容性和 AgNW 的高导电性,我们预计这里描述的 AgNW 微图案化水凝胶将特别有价值,可作为高效且机械稳定的微电极,用于开发下一代生物电子设备,特别是用于可植入生物医学设备。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/999b/5442115/3b5d4b19dcda/41598_2017_2511_Fig1_HTML.jpg

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