NH 等离子体和 Ti 掺杂对 pH 敏感的 CeO 电解质-绝缘体-半导体生物传感器的影响。

Influence of NH plasma and Ti doping on pH-sensitive CeO electrolyte-insulator-semiconductor biosensors.

机构信息

Department of Electronic Engineering, Chang Gung University, Taoyuan, 333, Taiwan, ROC.

Kidney Research Center, Department of Nephrology, Chang Gung Memorial Hospital, Chang Gung University, College of Medicine, Taoyuan, Taiwan, ROC.

出版信息

Sci Rep. 2017 May 25;7(1):2405. doi: 10.1038/s41598-017-02692-2.

DOI:10.1038/s41598-017-02692-2

PMID:28546585

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5445090/

Abstract

In this study, CeO pH-sensitive sensing membranes in electrolyte-insulator-semiconductor structures on silicon substrate were fabricated. To enhance sensing performance, the membrane underwent Ti doping and NH plasma treatment on the surface. To examine the effects of Ti doping and plasma treatment, multiple material properties evaluations were conducted using field-emission scanning electron microscopy, X-ray diffraction, atomic force microscopy, and secondary ion mass spectroscopy. Results indicate that Ti doping and plasma treatment can remove defects and enhance crystallization, thereby achieving improved pH-sensing performance of the membrane with high sensitivity, high linearity, low hysteresis voltage and low drift voltage. CeO-based EIS membranes with Ti doping and NH plasma treatment show promise for future portable pH-sensitive biosensors.

摘要

在这项研究中，我们在硅衬底上的电解质-绝缘体-半导体结构中制备了 CeO pH 敏感器件传感膜。为了提高传感性能，对传感膜进行了 Ti 掺杂和 NH 等离子体表面处理。为了研究 Ti 掺杂和等离子体处理的影响，我们使用场发射扫描电子显微镜、X 射线衍射、原子力显微镜和二次离子质谱对多种材料性能进行了评估。结果表明，Ti 掺杂和等离子体处理可以去除缺陷并增强结晶，从而实现了具有高灵敏度、高线性度、低迟滞电压和低漂移电压的膜 pH 传感性能的改善。基于 CeO 的具有 Ti 掺杂和 NH 等离子体处理的 EIS 膜有望成为未来的便携式 pH 敏感器。